“…Because of these excellent properties, Zinc oxide is used applications such as solar cells, biosensors, gas sensors, optoelectronic devices, transducers [2][3][4][5], liquid crystals display, light emitting diodes [6], visible light and UV photo-detectors [7,8]. ZnO layers have been grown by using different deposition techniques such as sol-gel, spin coating method [9], reactive evaporation [10], chemical vapor deposition (CVD) [11], magnetron sputtering [12], and atomic layer deposition (ALD) [13]. In the recent years, there has remarkable interest to deposit ZnO thin films using atomic layer deposition.…”