2018
DOI: 10.1007/s00339-018-2171-7
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Characterization of nano-crystalline Ti–W–N thin films for diffusion barrier application: a structural, microstructural, morphological and mechanical study

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Cited by 6 publications
(6 citation statements)
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“…As seen in Figure 2a, the thickness of the Ti-W-N coating was 2.81 ± 0.27 μm with a buffer layer of 200 to 240 nm deposited in all coatings; the thickness average was similar to the obtained by the profilometry method, which was 3.29 ± 0.06 μm. The evolution of the microstructure was the typical columnar growth of PVD processes, similar to those reported in [34,35]. In the case of the Ti-W-C coating (Figure 2b), the thickness was 3.54 ± 0.04 μm, however, when measured by the profilometer it was 2.95 ± 0.08 μm.…”
Section: Microstructural Analysissupporting
confidence: 81%
“…As seen in Figure 2a, the thickness of the Ti-W-N coating was 2.81 ± 0.27 μm with a buffer layer of 200 to 240 nm deposited in all coatings; the thickness average was similar to the obtained by the profilometry method, which was 3.29 ± 0.06 μm. The evolution of the microstructure was the typical columnar growth of PVD processes, similar to those reported in [34,35]. In the case of the Ti-W-C coating (Figure 2b), the thickness was 3.54 ± 0.04 μm, however, when measured by the profilometer it was 2.95 ± 0.08 μm.…”
Section: Microstructural Analysissupporting
confidence: 81%
“…The columnar structure morphology is clearly seen. It is thought that this is related to the addition of tungsten into the Ti-N, characterized by unidentified columnar structure which may be attributed to the increase in the covalent level of the bounding and so the attractive forces of the columns [16]. The obtained columns are 50–400 nm in section.…”
Section: Resultsmentioning
confidence: 99%
“…Top-view SEM micrographs for W-Ti-N film surface are presented in Figure 2(c,d) and show a dense microstructure built up of a mixture of nitride particles with tungsten and a rough surface due to an increase in the grain sizes associated with the high tungsten content in the film [16]. Grooves and pores with average diameter of 1.7 μm can also be observed.…”
Section: Resultsmentioning
confidence: 99%
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“…Besides, the mechanical properties of the TiWN film also depend on the N and W concentrations. For instance, the hardness values of TiWN films varied from 23 to 50 GPa in a composition range of 30-57 at% N [15]; while they changed from 13.9 to 26.3 GPa in a composition range of 0-50.6 at% W, following the variations in crystallinity [16][17][18].…”
Section: Introductionmentioning
confidence: 99%