Characterization of rhenium nitride films produced by reactive pulsed laser deposition

The Application of Barrierless Metallization in Making Copper Alloy, Cu(RuHfN), Films for Fine Interconnects

“…Thus, the lifetime of the Cu(RuHfN x ) film is considerably longer than that of the Cu(HfN x ) and pure Cu films, which again confirms that the Cu(RuHfN x ) film has higher thermal stability. This trend is similar to that observed for barrier metal layers such as TiN, 12 Ta, 12 and TaN. 12 In addition, metallization of the Cu(RuHfN x ) film is a simple and inexpensive process since the use of a barrier layer is not required.…”

Interstitial binary nitride ReNx phases prepared by pulsed laser deposition: Structure and superconductivity dependence on nitrogen stoichiometry

“…Another recent report described formation of ReN x film (x = 0.1, 0.9, and 1.3) on Si substrates. The samples gave X-ray diffraction peaks which are completely different from our cubic and hexagonal phase [50]. Table 3 nitrogen in tetrahedral sites (the zinc blende and wurtzite structures) gave much lower energies than those of structures having nitrogen in octahedral sites (NaCl and NiAs-type structures).…”

“…The study also reported the superconductivity of these phases. Another recent report described formation of ReN x films with unknown structure prepared by PLD [50].…”

First principles calculations of interstitial and lamellar rhenium nitrides

“…Until now, the nitrides of group VII have been scantily studied both theoretically and experimentally. Rhenium nitrides have been synthesized by several methods, including laser ablation [4,5], high-pressure high-temperature anvil cell reaction [6], the reaction of rhenium pellets with ammonia at high temperature [7], ion implantation of nitrogen into a rhenium foil [8] and reactive DC-magnetron sputtering, as we present here in this work. From the few reports available on the topic, the rhenium nitrides are expected to have exceptional properties, such as very high bulk moduli, high hardness and brittleness [9,10], catalytic activity [7], and superconductivity [8,11].…”