Characterization of Silicon Nitride-Cored Silicon Photonics Waveguide Material for Optical Microring Resonator

Hwang, Seokyeon; Lee, Min-Hee; Kim, Sung‐Chul; Hong, Sang Jeen

doi:10.1166/jno.2017.2155

Cited by 4 publications

(7 citation statements)

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“…This idea, which has earlier been reported by the authors in Ref. [18], has proved to be useful for the visible spectral range. While, in its earlier design, our AWG has shown the maximum bandwidth 15 nm defined at the level of 3 dB [18], the resolution in its present design has been greatly improved by increasing the focal length of slab regions and the number of arrayed waveguides.…”

Section: Resultsmentioning

confidence: 52%

“…[18], has proved to be useful for the visible spectral range. While, in its earlier design, our AWG has shown the maximum bandwidth 15 nm defined at the level of 3 dB [18], the resolution in its present design has been greatly improved by increasing the focal length of slab regions and the number of arrayed waveguides. Moreover, a decrease in the pitch size of the array aperture has enabled us to successfully achieve the maximal 3 dB bandwidth 4 nm, while the insertion loss at the transmission-spectrum peak has remained the same, 7.56 dB/cm.…”

Section: Resultsmentioning

confidence: 99%

“…[18]). Finite-difference time-domain simulations of the single-mode silicon-nitride waveguide have been performed to determine the effective and group indices.…”

Section: Design Strategymentioning

confidence: 99%

“…Our AWGs are based on a singlemode low-loss Si 3 N 4 waveguide, which has been reported in Ref. [16]. The waveguide is suited for the visible wavelengths and manifests a typical propagation loss as small as 0.1 dB/cm.…”

Section: Introductionmentioning

confidence: 99%

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Compact arrayed waveguide gratings for visible wavelengths based on silicon nitride

Hong¹,

Ali²

2017

Ukr. J. Phys. Opt.

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Abstract. We present two arrayed silicon-nitride-cored waveguide gratings (AWGs) that operate in a broad visible-wavelength range (400-800 nm), with the central wavelength 777 nm. Our Si 3 N 4 -cored AWGs are designed to satisfy single-mode waveguide characteristics. They reveal a typical propagation loss 0.1 dB/cm and a bending loss 0.1 dB at the bending angle 90 o . One of our AWGs provides five wavelength channels with the bandwidth 15 nm at level of 3 dB, while the other is suited for eight wavelength channels with an improved 3 dB bandwidth amounting to 4 nm. The insertion losses for the both AWGs at the peak of the transmission spectrum are equal to 7.56 dB/cm. Moreover, our AWGs reveal good spectral characteristics and small enough sizes (0.02 and 0.20 mm 2 for the five-and eightchannel AWGs, respectively).

show abstract

Section: Resultsmentioning

confidence: 52%

Section: Resultsmentioning

confidence: 99%

“…[18]). Finite-difference time-domain simulations of the single-mode silicon-nitride waveguide have been performed to determine the effective and group indices.…”

Section: Design Strategymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Compact arrayed waveguide gratings for visible wavelengths based on silicon nitride

Hong¹,

Ali²

2017

Ukr. J. Phys. Opt.

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“…Then a silicon photonic grating coupler would have a great advantage in fabricating on-wafer optical sensors inside the plasma chamber. Depending on its geometry, this type of grating coupler can accept selectively vertically injected light, whereas a silicon-nitride waveguide with a siliconoxide cladding can efficiently transmit visible light [8,9].…”

Section: Introductionmentioning

confidence: 99%

Silicon photonic grating coupler for monitoring optical emission of plasma

Lee¹,

Sung²,

Sang³

2018

Ukr. J. Phys. Opt.

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An optical waveguide and a grating coupler based on silicon photonics are designed and fabricated. The device is intended for monitoring the spectral line 777 nm of oxygen plasma, which corresponds to electron relaxation of oxygen atoms in the plasma. To provide a maximum surface-coupling efficiency, we optimize the thickness of silicon-oxide cladding and the geometry of the grating coupler, using finite differential time-domain simulations. Two methods are used when fabricating a silicon photonic chip, a micro-fabrication with electron-beam lithography and a semiconductor-based process that employs a 248 nm optical lithography technology. We suggest our coupler as a conceptual approach to onwafer photon-collecting devices designed for studying glow-discharge plasmas.

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Surface coupling of plasma optical emission spectra with bent metal-clad waveguide

Ali

Hong

2019

Opt Quant Electron

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Characterization of Silicon Nitride-Cored Silicon Photonics Waveguide Material for Optical Microring Resonator

Cited by 4 publications

References 0 publications

Compact arrayed waveguide gratings for visible wavelengths based on silicon nitride

Compact arrayed waveguide gratings for visible wavelengths based on silicon nitride

Silicon photonic grating coupler for monitoring optical emission of plasma

Surface coupling of plasma optical emission spectra with bent metal-clad waveguide

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