Characterization of SnO2 films deposited by d.c. gas discharge activating reaction evaporation onto amorphous and crystalline substrates

Zhu, Yihua; Lu, Hui; Yuancheng, Lu; Xiaoren, Pan

doi:10.1016/0040-6090(93)90462-x

Cited by 22 publications

(6 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Thin films are especially suitable for gas sensors, since the gas sensing properties are related to the material surface and the gases always adsorb and react with the surface [5]. Therefore, in comparison with conventional sintered bulk gas sensors, thin film-based gas sensors have good sensitivity and selec-tivity [6,7].…”

Section: Introductionmentioning

confidence: 99%

Nanocrystalline CuO Thin Films for H<sub>2</sub>S Monitoring: Microstructural and Optoelectronic Characterization

Patil¹,

Jundale²,

Pawar³

et al. 2011

JST

View full text Add to dashboard Cite

Nanocrystalline copper oxide (CuO) thin films were deposited onto glass substrates by a spin coating technique using an aqueous solution of copper acetate. These films were characterized for their structural, morphological, optoelectronic properties by means of X-ray diffraction (XRD) scanning electron microscopy (SEM), UVspectroscopy and four probe method. The CuO films are oriented along (1 1 1) plane with the monoclinic crystal structure. These films were utilized in H 2 S sensors. The dependence of the H 2 S response on the operating temperature, H 2 S concentration of CuO film (annealed at 700˚C) was investigated. The CuO film showed selectivity for H 2 S. The maximum H 2 S response of 25.2% for the CuO film at gas concentration of 100 ppm at operating temperature 200˚C was achieved.

show abstract

Section: Introductionmentioning

confidence: 99%

Nanocrystalline CuO Thin Films for H<sub>2</sub>S Monitoring: Microstructural and Optoelectronic Characterization

Patil¹,

Jundale²,

Pawar³

et al. 2011

JST

View full text Add to dashboard Cite

show abstract

“…The preparation conditions and details of the dc gas discharge ARE deposition systems are described elsewhere. 3,6 Zinc ͑99.9%͒ was used as the source material. The ZnO UFP films were prepared under an oxygen gas discharge forming plasma.…”

Section: Methodsmentioning

confidence: 99%

Effect of substrate temperature and annealing on the structural properties of ZnO ultrafine particle films

Zhao

Zhongkai

Xiaoren

et al. 1997

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

View full text Add to dashboard Cite

ZnO ultrafine particle (UFP) films were deposited on glass and SiO2 substrates by a direct current gas discharge activated reactive evaporation method. The effect of substrate temperature and annealing on the structure and morphology of ZnO UFP films was studied by x-ray diffraction and scanning electron microscope. The results show that the spherical island density decreases with increasing annealing temperature and the structure becomes polycrystalline with a (002) preferential orientation as the substrate temperature increases. In addition, angle resolved x-ray photoelectron spectroscopy was used to study the absorption of water on the ZnO UFP film surface by measuring the two deconvoluted peaks for O 1s. The two deconvoluted peaks for O 1s were located at 533.2 and 534.8 eV. The absorption coefficients of water on the surface were 0.52 and 0.43, respectively, for nonannealed and annealed ZnO UFP films.

show abstract

“…Nanocrystalline films with a porous columnar structure have higher sensitivities and lower optimal operating temperatures than those with larger grain sizes [95]. Nanocrystalline films with a porous columnar structure have higher sensitivities and lower optimal operating temperatures than those with larger grain sizes [95].…”

Section: Integrated Solid-state Sensorsmentioning

confidence: 99%

Nanostructured Metal Oxide Gas Sensors for Air-Quality Monitoring

Rickerby

Serventi

2010

Environanotechnology

View full text Add to dashboard Cite

Characterization of SnO2 films deposited by d.c. gas discharge activating reaction evaporation onto amorphous and crystalline substrates

Cited by 22 publications

References 7 publications

Nanocrystalline CuO Thin Films for H<sub>2</sub>S Monitoring: Microstructural and Optoelectronic Characterization

Nanocrystalline CuO Thin Films for H<sub>2</sub>S Monitoring: Microstructural and Optoelectronic Characterization

Effect of substrate temperature and annealing on the structural properties of ZnO ultrafine particle films

Nanostructured Metal Oxide Gas Sensors for Air-Quality Monitoring

Contact Info

Product

Resources

About

Characterization of SnO2 films deposited by d.c. gas discharge activating reaction evaporation onto amorphous and crystalline substrates

Cited by 22 publications

References 7 publications

Nanocrystalline CuO Thin Films for H&lt;sub&gt;2&lt;/sub&gt;S Monitoring: Microstructural and Optoelectronic Characterization

Nanocrystalline CuO Thin Films for H&lt;sub&gt;2&lt;/sub&gt;S Monitoring: Microstructural and Optoelectronic Characterization

Effect of substrate temperature and annealing on the structural properties of ZnO ultrafine particle films

Nanostructured Metal Oxide Gas Sensors for Air-Quality Monitoring

Contact Info

Product

Resources

About

Nanocrystalline CuO Thin Films for H<sub>2</sub>S Monitoring: Microstructural and Optoelectronic Characterization

Nanocrystalline CuO Thin Films for H<sub>2</sub>S Monitoring: Microstructural and Optoelectronic Characterization