1995
DOI: 10.1143/jpsj.64.4185
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Characterization of Soft X-Rays Generated in Gas-Puffed Z-Pinch

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Cited by 8 publications
(2 citation statements)
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“…Soft x-ray sources are attracting attention in many fields, such as lithography for the production of highly integrated circuits and the observation of microorganisms [1][2][3][4][5][6][7]. Research on gas-puff z-pinch plasma soft x-ray sources using pinching of a plasma column has recently been undertaken.…”
Section: Introductionmentioning
confidence: 99%
“…Soft x-ray sources are attracting attention in many fields, such as lithography for the production of highly integrated circuits and the observation of microorganisms [1][2][3][4][5][6][7]. Research on gas-puff z-pinch plasma soft x-ray sources using pinching of a plasma column has recently been undertaken.…”
Section: Introductionmentioning
confidence: 99%
“…Gas-puff z-pinch plasmas [l], [2] have possibilities as a soft X-ray source for the lithography method [3], X-ray microscopy and a breakthrough in X-ray laser [4] because they can produce comparatively high temperature and density plasmas with compact and simple equipment. But it is difficult to produce stable and reproducible plasmas or hot spots [5] due to lack of the uniformity of injected gas distributions [6], [7] and insufficient the current value and rise time flowing through the plasmas in the experimental conditions.…”
Section: Intoroductionmentioning
confidence: 99%