2004
DOI: 10.1002/sia.1877
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Characterization of sol–gel derived glass composite thin films

Abstract: A comprehensive analysis of composition and structure is essential for the development of new materials with tailored properties. We will demonstrate the application of SEM, XPS and XRD for the development of thin films containing nano-scaled electrical conductive particles for application in hybrid resistors.The films were prepared using the sol-gel process and precursor solutions were synthesized from an acid hydrolysis of a mixture of TEOS, water and ethanol. Alcoholic solutions of ruthenium chloride were t… Show more

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Cited by 2 publications
(3 citation statements)
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“…The reported resistivity values are within the range reported by Jeng et al for their 30:1 Ru:Si sol–gel films . Jeng et al annealed their films in a nitrogen atmosphere, which is known to inhibit the growth of RuO 2 particles as confirmed by Shimamura et al The sol–gel films prepared here were annealed under ambient atmospheric conditions allowing the RuO 2 particles to expand in size and become fully oxidized. This increase in particle size creates more contacts throughout the films causing the resistivity to decrease.…”
Section: Resultssupporting
confidence: 84%
“…The reported resistivity values are within the range reported by Jeng et al for their 30:1 Ru:Si sol–gel films . Jeng et al annealed their films in a nitrogen atmosphere, which is known to inhibit the growth of RuO 2 particles as confirmed by Shimamura et al The sol–gel films prepared here were annealed under ambient atmospheric conditions allowing the RuO 2 particles to expand in size and become fully oxidized. This increase in particle size creates more contacts throughout the films causing the resistivity to decrease.…”
Section: Resultssupporting
confidence: 84%
“…Moreover, the metal oxide coatings are susceptible to ion diffusion from the metal oxide films into the substrates, which can be unfavorable for long-term device performance . As such, much research has been devoted to find a simple solution-based route to fabricate highly stable electrically conductive thin films. , Carbon nanotube (CNT) networks are a potential alternative and can be fabricated via a solution-based method. CNTs in an appropriate solvent are filtered using a filter such as porous alumina and transferred to a transparent substrate using polydimethylsiloxane (PDMS) via a printing method …”
mentioning
confidence: 99%
“…25 As such, much research has been devoted to find a simple solution-based route to fabricate highly stable electrically conductive thin films. [7][8][9][26][27][28][29][30][31][32] Carbon nanotube (CNT) networks are a potential alternative and can be fabricated via a solution-based method. CNTs in an appropriate solvent are filtered using a filter such as porous alumina and transferred to a transparent substrate using polydimethylsiloxane (PDMS) via a printing method.…”
mentioning
confidence: 99%