Characterization of the closed circuit response of an on-chip thin film thermopile

Imran, Muhammad; Bhattacharyya, Abhijit

doi:10.1016/j.sna.2006.02.039

Cited by 4 publications

(2 citation statements)

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“…Our specific interest is in the thermal and electrical properties of metallic thin films. We have fabricated an integrated microdevice that when connected to a power supply and a data acquisition system, contains the necessary components required to determine the in-situ, in-plane thermal and electrical properties of sputtered thin films (2). The micro-device is an assembly of resistance temperature detectors (RTDs), sputtered thin films and microthermocouples.…”

Section: Introductionmentioning

confidence: 99%

“…The open literature has reported work on a wide variety of RTDs, some of which has been fabricated using the following metals: Iron (Fe) and Silicon (Si) alloy (14), Copper (Cu) (1,2,10), and Platinum (Pt) (15,16,17). Apart from the use of Cu-RTDs in our research (1,2), their use has also been reported elsewhere (18). Low cost and availability were the two primary factors as to why we chose copper.…”

Section: Introductionmentioning

confidence: 99%

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The effects of heat sinks and environmental pressure on the transient thermal response of a resistance temperature detector (RTD)

2006

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Compactness and portability of MEMS sensors and actuators with dedicated power sources are governed not only by the size of the system components but also by the size and durability of the power source itself. This work is part of a project on the characterization and modeling of heat transfer of an on-chip assembly of RTDs (resistance temperature detectors), microthermocouples and thin films of different materials (1,2). In this paper, we investigate the effects of conductive and convective heat transfer on the response of an RTD. Especially, the effects of a range of pressures from atmospheric to near-vacuum conditions at different applied voltages on the electrical energy consumption of an on-chip RTD are investigated. The transient temperature -time response as well as the power consumption of the RTD under the aforementioned conditions are also reported. Conductive effects are far more important than any other heat transfer mechanism; these effects are quantified.

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Section: Introductionmentioning

confidence: 99%