Characterization of thin film thickness and density by low angle X-ray interference

Koenig, J.; Carron, G.

doi:10.1016/0025-5408(67)90072-4

Cited by 9 publications

(3 citation statements)

References 5 publications

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“…In addition, the 10-layer sample shows a Bragg peak, suggesting an ordered film formation. A rough estimation of the structural parameters is obtained using the Koenig and Carron equation 33,34 where h is the total film thickness and m is the order of the interference fringe. θ m is the reflection angle of the mth fringe, and θ c is the critical angle for total external reflection.…”

Section: X-ray Reflectivitymentioning

confidence: 99%

Polar Polymeric Langmuir−Blodgett Films for Optical Applications

et al. 1997

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A side-chain liquid crystalline copolymer containing ether−nitrobiphenyl groups was investigated as a nonlinear optical material. Ultrathin films have shown second harmonic generation and therefore have a variety of interesting applications. Waveguides composed of multilayers of the copolymer have been fabricated, and propagation losses as low as 2.3 dB/cm in a lowest order TE mode at 800 nm wavelength have been measured. The second harmonic coefficient is d 33 = 42.0 ± 1.7 pm/V at the 1064 nm fundamental wavelength and is consistent with an oriented gas model. From spectroscopic ellipsometry measurements the film refractive index is 2.24 ± 0.15 and the extinction coefficient ≤0.05 in the visible range of wavelengths. The monolayer and multilayer repeat structures were also studied by X-ray reflectivity and diffraction. The optical thickness and the oscillations in the reflectivity were in reasonable accord with a repeat length of about 3.6 nm.

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Section: X-ray Reflectivitymentioning

confidence: 99%

Polar Polymeric Langmuir−Blodgett Films for Optical Applications

et al. 1997

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“…By varying the angle of incidence beyond the critical angle a reflectivity profile can be obtained which shows the reflectivity as a function of the penetration of the incident x-ray beam. This reflectivity profile can contain structural information (Kiessig 1931, Parratt 1954, Wainfan et a1 1959, Koenig and Carron 1967, Isherwood 1977. For example, in the three-layer case (air/thin-layer/substrate) shown schematically in figure Reflection geometry in a three-layer (i.e.…”

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confidence: 99%

“…2 a scan of the glancing angle will firstly show TER from the top surface followed by a series of Keissig fringes due to interference between the specularly scattered xrays from the 'top' and 'buried' interfaces. From the fringe positions the layer thickness t and the mean electron density of the film can be easily calculated (Koenig and Carron 1967), thus…”

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confidence: 99%

Characterisation of polyphenylene thin films using synchrotron radiation X-ray reflectivity

Sherwood

Shripathi

Oldman

et al. 1990

J. Phys. D: Appl. Phys.

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The technique of synchrotron radiation X-ray reflectivity is presented and its application to the non-destructive characterisation of polymer thin films outlined. The technique is applied to an investigation of the structure of polyphenylene thin films prepared on indium/tin oxide coated glass substrates. Samples synthesised from carbonate-based precursors have a higher density than those prepared from acetate-based precursors. Possible molecular origins are discussed.

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