Characterization of Ti–Zr–N films deposited by cathodic vacuum arc with different substrate bias

Niu, Erwu; Li, L.; Lv, Guohua; Chen, H.; Li, X.Z.; Yang, Xiaoqiu; Yang, Shengrong

doi:10.1016/j.apsusc.2007.12.022

Cited by 38 publications

(13 citation statements)

References 26 publications

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“…Due to imperfections of the substrate polishing, which is reproduced in the coatings, there is scattering of the data. Nevertheless, the nanohardness data in Table 1 match the reported ones in the literature [1,[46][47][48] and this finding is a basic premise of the current investigation. For an additional comparison, the typical nanohardness for mild steel does not exceed 2-3 GPa.…”

Section: Xrd Tem and Mechanical Characterization Of Sputtered Coatinsupporting

confidence: 91%

“…We already mentioned the indication for such variation in the XRD diagrams of our samples. An increase of nanohardness with negative bias potential was observed in TiN films deposited by cathodic vacuum arc deposition with different substrate bias [46]. Similar behavior was observed for Zr-Si-N thin films deposited at substrate temperature 510 K [45] and the increment of nanohardness was about 8 GPa when the bias was increased from 0 to −150 V. It was stated there [45] that increased hardness cannot be attributed to the residual stress in the films deposited at 510 K. It was found also that nanoindentation measurement cannot reflect the variation of residual stress in TiN films deposited at 300°C and 500°C [47].…”

Section: Xrd Tem and Mechanical Characterization Of Sputtered Coatinmentioning

confidence: 90%

See 1 more Smart Citation

Corrosion behavior of hybrid coatings: Electroless Ni–Cu–P and sputtered TiN

Valova

Georgieva

Armyanov

et al. 2010

Surface and Coatings Technology

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Section: Xrd Tem and Mechanical Characterization Of Sputtered Coatinsupporting

confidence: 91%

Section: Xrd Tem and Mechanical Characterization Of Sputtered Coatinmentioning

confidence: 90%

Corrosion behavior of hybrid coatings: Electroless Ni–Cu–P and sputtered TiN

Valova

Georgieva

Armyanov

et al. 2010

Surface and Coatings Technology

View full text Add to dashboard Cite

“…Scratch test is generally considered as one of the simple means in assessing adhesion strength of a film on its substrate [69][70][71]. Additionally, it has been widely used to evaluate the bonding strength [72] and tribological behaviors (friction and wear) of thin films [73,74]. The nanoscratch technique provides a simple, versatile and rapid means to assess the scratch wear resistance among the techniques available to evaluate the nanotribological properties of thin films.…”

Section: Scratchingmentioning

confidence: 99%

Cracking and Toughening Mechanisms in Nanoscale Metallic Multilayer Films: A Brief Review

Zhou

Ren

et al. 2018

Applied Sciences

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Nanoscale metallic multilayer films (NMMFs) have captured scientific interests on their mechanical responses. Compared with the properties of monolithic films, multilayers possess unique high strength as the individual layer thickness reduces to the nanoscale, which is benefited from the plentiful hetero-interfaces. However, NMMFs always exhibit a low fracture toughness and ductility, which seriously hinders their practical applications. While there have been reviews on the strengthening and deformation mechanisms of microlaminate, rapid developments in nanotechnology have brought an urgent requirement for an overview focused on the cracking and toughening mechanisms in nanoscale metallic multilayers. This article provides an extensive review on the structure, standard methodology and fracture mechanisms of NMMFs. A number of issues about the crack-related properties of NMMFs have been displayed, such as fracture toughness, wear resistance, adhesion energy, and plastic instability. Taken together, it is hoped that this review will achieve the following two purposes: (1) introducing the size-dependent cracking and toughness performance in NMMFs; and (2) offer a better understanding of the role interfaces displayed in toughening mechanisms. Finally, we list a few questions we concerned, which may shed light on further development.

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“…At the same time, nanoscratch techniques have been widely used to evaluate the bonding strength [20] and tribological behaviors of friction layers [21]. Hence, the FEM and nanoindentation are used to investigate the tribological property of friction layers in this paper.…”

Section: Introductionmentioning

confidence: 99%

Formation of Friction Layers in Graphene-Reinforced TiAl Matrix Self-Lubricating Composites

Chen

Shi

et al. 2015

Tribology Transactions

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The friction layer structure has been proved to be formed during severe plastic deformation process and markedly improve the tribological properties of material. The dry friction and wear performances of graphene-reinforced TiAl matrix self-lubricating composites (GTMSC) at different sliding velocities are systematically researched. GTMSC show the best tribological properties and special friction layer structure containing a wear-induced layer and a grain refinement layer with nanocrystalline (NC) structure under the surface after sliding at the sliding speed of 1.1m/s. Nanoindentation results show that the grain refinement layer has the higher hardness and elastic modulus than the wear-induced layer. This special microstructure of friction layers beneath the surface after sliding leads to the low coefficient of friction and high wear resistance of GTMSC. Moreover, It's deduced that the appearance of NC structure results in the hardening of material. The formation mechanisms of friction layers are researched in detail. It ACCEPTED MANUSCRIPT ACCEPTED MANUSCRIPT2 can be concluded that the formation of wear-induced layer is resulted from frictional heat and fracture of counterpart. The formation of grain refinement layer owes to the severe plastic deformation and dynamic recrystallization. The severe plastic deformation results in the formation of NC structure and the dynamic recrystallization leads to the grain refinement.

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Characterization of Ti–Zr–N films deposited by cathodic vacuum arc with different substrate bias

Cited by 38 publications

References 26 publications

Corrosion behavior of hybrid coatings: Electroless Ni–Cu–P and sputtered TiN

Corrosion behavior of hybrid coatings: Electroless Ni–Cu–P and sputtered TiN

Cracking and Toughening Mechanisms in Nanoscale Metallic Multilayer Films: A Brief Review

Formation of Friction Layers in Graphene-Reinforced TiAl Matrix Self-Lubricating Composites

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