Characterization of TiAlBN Nanocomposite Coating Deposited via Radio Frequency Magnetron Sputtering Using Single Hot-Pressed Target

Rosli, Zulkifli Mohd; Loon, Kwan Wai; Juoi, Jariah Mohamad; Nayan, Nafarizal; Mahamud, Zainab; Yusuf, Yusliza

doi:10.4028/www.scientific.net/amr.626.298

Cited by 8 publications

(5 citation statements)

References 13 publications

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“…All of the deposited coatings showed diffraction peaks corresponding to TiN phase at plane (111), (200), and (220). The TiB 2 and BN phases were not detected in the GAXRD spectra as these phases exist as an amorphous [10]. It can be seen that the intensity of the TiN peaks of plane (111) and plane (200) were affected when the R N was varied.…”

Section: Resultsmentioning

confidence: 99%

Effect of Nitrogen-to-Total Gas Flow Ratio on the Nanocomposite TiAlBN Coating

Rosli

Kwan

Rashid

et al. 2015

AMM

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A nanocomposite TiAlBN (n-TiAlBN) coating has been successfully deposited via RF magnetron sputtering by varying the nitrogen-to-total gas flow ratio (RN) at a substrate temperature of 300 °C. The coating was deposited on AISI 316 substrates using a single Ti-Al-BN hot-pressed target. The crystal phases, grain size and chemical composition of the coatings were measured using the glancing angle X-ray diffraction analysis (GAXRD) and X-ray photoelectron spectroscopy (XPS). The grains size of the n-TiAlBN coating was found to be within the range of 3.5 to 5.7 nm calculated using Scherrer’s formula. The n-TiAlBN coating reached a nitride saturated state at a higher RN (e.g >15%) with the amount of boron concentration to be around 9 at. %. Further, reducing the RN (e.g. 5%) has increased the boron concentration to 16.17 at. %. This paper shows that by carefully control the nitrogen-to-total gas flow ratio (RN) in the n-TiAlBN coating, it indeed gives a significant effect on its crystallographic structure, grain size, and chemical compositions.

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Section: Resultsmentioning

confidence: 99%

Effect of Nitrogen-to-Total Gas Flow Ratio on the Nanocomposite TiAlBN Coating

Rosli

Kwan

Rashid

et al. 2015

AMM

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“…Similarly, the N 1s peak can be curve fitted into two main components corresponding to (Ti,Al)N (397 eV for sample deposited at 15% R N , and 396 eV and 397 eV for sample deposited at 5% R N ) and BN (398 eV). Since BN and TiB 2 phase was not detected by GAXRD, (published elsewhere in [14,15]), thus, it can be deduced that they exist in amorphous phase. In addition, it was found that the amount of BN and TiB 2 phase differs with varying R N (indicated from the intensity of BN and TiB 2 peaks).…”

Section: Resultsmentioning

confidence: 99%

“…Deposition of TiAlBN nanocomposite coatings were conducted using PSP5004 SNTEK radio frequency (RF) magnetron sputtering. Detail of the deposition parameters can be found elsewhere [14,15]. The TiAlBN nanocomposite coatings were deposited at various nitrogen- to-total gas flow ratio (R N ) of 5, 15, 20, and 25%, and at various substrate temperature of 100, 200, 300, and 400ºC.…”

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Chemical Composition Analysis of TiAlBN Nanocomposite Coating Deposited via RF Magnetron Sputtering

Rosli

Mahamud

Kwan

et al. 2013

KEM

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TiAlBN nanocomposite coating have been successfully deposited on AISI 316 substrate via RF magnetron sputtering by varying nitrogen-to-total flow ratio (RN) of 5, 15, 20, 25%, as well as varying substrate temperature of 100, 200, 300, and 400 oC; using single Ti-Al-BN hot-pressed target. Chemical compositions of the coatings were analysed using X-ray photoelectron spectroscopy (XPS). XPS results showed that the TiAlBN nanocomposite coating reaches a nitride saturated state at higher RN(e.g 15, 20, and 25%) and boron concentration was found to be approximately 9 at.%. However, as the concentration of nitrogen decreases at lower RN(5%), boron concentration was found to increase to 16.17 at. %.This is due to the increase of TiB2phase in the coating. Variations of substrate temperatures were found to give no significant effect on the chemical composition of the deposited TiAlBN nanocomposite coating.

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“…Recently, a nanocomposite TiAlBN coating was successfully deposited via r.f. magnetron sputtering technique on a steel substrate which consist of nc-(Ti,Al)N, a-BN and a-TiB 2 phases [10][11]. Nitride based hard coatings like TiN, (TiAl)N, BN and etc.…”

Section: Introductionmentioning

confidence: 99%

Corrosion Performance of Nitrided Based Coating on AZ9I Mg Alloy in Hank’s Solution

Zulkifli

Zaimi

Juoi

et al. 2015

MSF

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The use of Magnesium alloys as bioresorsable metallic implant is interesting to study due to the properties of magnesium ions which can be found naturally in bone tissue as well as are essential to human metabolism. However, its fast degradation rate and excess of these ions in the body may cause undesirable health effects. Therefore, surface treatment such as coating can offer an alternative solution to slow down the fast degradation rate of magnesium alloy. Thus, in this study, attempt has been made to coat the AZ91 magnesium alloy substrate with TiN, AlN and TiAlBN coatings using single hot press target with r.f. magnetron sputtering technique. During deposition, target power, working pressure and bias voltage were optimized for each coating deposition. Coating microstructure and its crystal phases are analysed using SEM and glancing angle X-ray diffraction analysis (GAXRD). Corrosion properties were evaluated using potentiodynamic polarization using Hank’s Solution as a medium to simulate body fluid. Result showed that TiAlBN coating is acting most successfully as a protection layer by slowing down the penetration of corrosion towards AZ91 Mg alloy substrate. SEM micrographs show a minimum damage to the substrate’s surface seen after subjected to corrosion test. In conclusion, TiAlBN coating is able to protect AZ91 Mg alloy substrate surface from corrosion and able to slow down their degradation rate. The better performance of TiAlBN coating create interest to further works on exploring the potential of this hard coated on AZ91 Mg alloy for biomaterial application.

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Characterization of TiAlBN Nanocomposite Coating Deposited via Radio Frequency Magnetron Sputtering Using Single Hot-Pressed Target

Cited by 8 publications

References 13 publications

Effect of Nitrogen-to-Total Gas Flow Ratio on the Nanocomposite TiAlBN Coating

Effect of Nitrogen-to-Total Gas Flow Ratio on the Nanocomposite TiAlBN Coating

Chemical Composition Analysis of TiAlBN Nanocomposite Coating Deposited via RF Magnetron Sputtering

Corrosion Performance of Nitrided Based Coating on AZ9I Mg Alloy in Hank’s Solution

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