2015
DOI: 10.1016/j.surfcoat.2015.08.007
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Characterization of TiAlSiON coatings deposited by plasma enhanced magnetron sputtering: XRD, XPS, and DFT studies

Abstract: Abstract.The results of characterization of TiAlSiON hard coatings deposited on ferric-chromium AISI Comparison of XPS valence band spectra with specially performed density functional theory calculations for two ordered and few disordered TiN 1-x O x (0≤x≤1) demonstrates that a Ti(Al)O x N y phase is formed on the surface of AISI430 steel upon the plasma enhanced magnetron sputtering, which provides this material with a good combination of high hardness and improved oxidation resistance.

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Cited by 15 publications
(3 citation statements)
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“…Compared with activated CAU-23, the sample of CAU-23 adsorbed with CR showed larger and higher content of the characteristic peaks in C–C, SO, −SO 3 , and more characteristic peaks in NN and −NH 2 (Figure S5), all indicating the successful adsorption of CR by CAU-23. The Al 2p spectra of native CAU-23 yielded Al–O and Al–OH peaks at 73.86 and 73.03 eV, respectively . After adsorption, the Al–O and Al–OH peaks shifted to 73.03 and 72.86 eV, respectively.…”
Section: Results and Discussionmentioning
confidence: 98%
“…Compared with activated CAU-23, the sample of CAU-23 adsorbed with CR showed larger and higher content of the characteristic peaks in C–C, SO, −SO 3 , and more characteristic peaks in NN and −NH 2 (Figure S5), all indicating the successful adsorption of CR by CAU-23. The Al 2p spectra of native CAU-23 yielded Al–O and Al–OH peaks at 73.86 and 73.03 eV, respectively . After adsorption, the Al–O and Al–OH peaks shifted to 73.03 and 72.86 eV, respectively.…”
Section: Results and Discussionmentioning
confidence: 98%
“…Recently, increasing attention has been paid to nitride coatings with multilayer architecture due to their high mechanical and tribological characteristics [ 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 ]. The multilayer architecture of the obtained coatings makes it possible to influence the structural-phase state of the layers by changing the modulation period of alternating layers, and, in addition, allows for combining their individual properties [ 15 , 16 , 17 , 18 ].…”
Section: Introductionmentioning
confidence: 99%
“…Several technologies have been used to produce TiN coatings, including sol-gel [6], physical vapor deposition (PVD) [7], chemical vapor deposition (CVD) [8] and plasma sputtering (PS) [9]. All the above mentioned techniques have their own characteristics and therefore the quality and performance of the resulting prepared coatings differs a lot.…”
Section: Introductionmentioning
confidence: 99%