Characterization of yttria-stabilized zirconia thin films grown by pulsed laser deposition (PLD) on various substrates

Rodrigo, Katarzyna Agnieszka; Knudsen, Jesper; Pryds, Nini; Schou, Jørgen; Linderoth, Søren

doi:10.1016/j.apsusc.2007.07.194

Cited by 38 publications

(21 citation statements)

References 12 publications

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“…sub μm thickness), the operating temperature could be significantly reduced 6,22 . Great efforts have been put in the last decades on the deposition of thin electrolyte layers 20 and several approaches have been pursued, including spray pyrolysis [23][24][25] , sputtering 26,27 , Pulsed Laser Deposition (PLD) 6,19,[28][29][30][31] , Chemical Vapour Deposition (CVD) 32,33 or Atomic Layer Deposition (ALD) 10,34,35 . In particular, physical vapour deposition techniques, mainly PLD, ALD and sputtering, have been proven to be very effective on the deposition of dense and homogeneous layers of such complex oxide films, see e.g.…”

Section: The Electrolytementioning

confidence: 99%

Micro solid oxide fuel cells: a new generation of micro-power sources for portable applications

et al. 2017

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Portable electronic devices are already an indispensable part of our daily life; and their increasing number and demand for higher performance is becoming a challenge for the research community. In particular, a major concern is the way to efficiently power these energy-demanding devices, assuring long grid independency with high efficiency, sustainability and cheap production. In this context, technologies beyond Li-ion are receiving increasing attention, among which the development of micro solid oxide fuel cells (μSOFC) stands out. In particular, μSOFC provides a high energy density, high efficiency and opens the possibility to the use of different fuels, such as hydrocarbons. Yet, its high operating temperature has typically hindered its application as miniaturized portable device. Recent advances have however set a completely new range of lower operating temperatures, i.e. 350-450ºC, as compared to the typical >900ºC needed for classical bulk SOFC systems. In this work, a comprehensive review of the status of the technology is presented. The main achievements, as well as the most important challenges still pending are discussed, regarding (i.) the cell design and microfabrication, and (ii.) the integration of functional electrolyte and electrode materials. To conclude, the different strategies foreseen for a wide deployment of the technology as new portable power source are underlined.

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Section: The Electrolytementioning

confidence: 99%

Micro solid oxide fuel cells: a new generation of micro-power sources for portable applications

et al. 2017

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“…In that sense, pulsed-laser deposition (PLD) [10] and reactive magnetron sputtering (RMS) [11] are promising to produce YSZ thin films. PLD is known for its ability to grow adherent, crystalline thin (0.001-1 µm) films respecting the stoichiometry of the target.…”

Section: Introductionmentioning

confidence: 99%

Yttria-stabilized zirconia thin films deposited by pulsed-laser deposition and magnetron sputtering

Hidalgo

Reguzina

Millon

et al. 2011

Surface and Coatings Technology

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Yttria-stabilized zirconia (YSZ, ZrO 2 :Y 2 O 3 ) was deposited on (100) silicon by two physical vapor deposition techniques: pulsed laser deposition (PLD) and reactive magnetron sputtering (RMS). PLD thin films were grown on silicon substrates at 500°C from the ablation of a 8YSZ ceramic target by a KrF excimer laser. RMS thin films were obtained by direct current magnetron sputtering of a Zr/Y metallic target in an oxygen/argon atmosphere. The deposition rate of the PLD technique using an UV excimer laser delivering pulses at a repetition rate of 40 Hz was found two orders of magnitude lower than the RMS method one. Both techniques led to the growth of crystalline films with a (111) preferential orientation. PLD films were dense and featureless whereas RMS ones exhibited well defined but compact columnar structure. Growth of a YSZ film of about 1 µm covering a rough and porous commercial anode support (NiO-YSZ cermet) was successfully carried out with both methods.

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“…Zirconia is critical for electrical property and thermal, mechanical, chemical stability, [1][2][3] and its thin films have attracted much attention for such applications as the miniaturization of solid oxide fuel cells (SOFCs), [4][5][6] thermal-shield or corrosion-resistant coatings, 7) buffer layers of electric devices, 8) optical coatings 9) and oxygen sensors. 10) Thin and dense films are needed for these applications.…”

Section: Introductionmentioning

confidence: 99%

“…10) Thin and dense films are needed for these applications. To improve such properties many YSZ films are fabricated by PVD or CVD methods including pulsed laser deposition (PLD), 5) electron-beam physical vapor deposition (EB-PVD), 11) magnetron sputtering, 12) and metal organic chemical vapor deposition (MOCVD). 13) On the other hand liquid phase deposition (LPD) methods such as spin coating, 14) electrophoresis deposition (EPD), 15) electrochemical deposition (ECD), 16) and mist deposition 17) have also been used for relatively thick films.…”

Section: Introductionmentioning

confidence: 99%

Effect of Pulsed Electrical Field on Deposition of YSZ Thin Films in an Aqueous Solution

2010

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In this study we investigated YSZ thin film deposition from an aqueous solution by applying constant electrical field and the effect of a pulsed electrical field upon the growth condition of films. The precursor was an aqueous solution of Zr(NO 2 ) 3 -2H 2 O, Y(NO 3 ) 3 -6H 2 O, and 0.5 vol% NH 3 (aq). The thin film was deposited on the minus electrode side of the glass substrate, which was placed above the minus electrode with a gap distance of 48-530 mm. By applying the electrical field, the thin film was effectively deposited on glass substrates under an applied voltage of 2.5 V for 300 s at room temperature. The as-deposited film was amorphous, and a crystalline phase with a transparent and smooth surface can be obtained after annealing at 773 K for 3 h in air. When a pulse bias is applied to the electrical field, the film thickness, surface defects, and roughness were changed with the frequency. At 2 Hz, the film was fabricated effectively, and a thick film was obtained, but films with smoother and fewer defect surfaces were obtained in a range of about 10-100 Hz.

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Characterization of yttria-stabilized zirconia thin films grown by pulsed laser deposition (PLD) on various substrates

Cited by 38 publications

References 12 publications

Micro solid oxide fuel cells: a new generation of micro-power sources for portable applications

Micro solid oxide fuel cells: a new generation of micro-power sources for portable applications

Yttria-stabilized zirconia thin films deposited by pulsed-laser deposition and magnetron sputtering

Effect of Pulsed Electrical Field on Deposition of YSZ Thin Films in an Aqueous Solution

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