2017
DOI: 10.1051/epjconf/201716201055
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Characterization of Zinc Oxide (ZnO) piezoelectric properties for Surface Acoustic Wave (SAW) device

Abstract: Abstract. In fabricating Surface Acoustic Wave (SAW) biosensors device, the substrate is one of important factors that affected to performance device. there are many types of piezoelectric substrate in the markets and the cheapest is zinc Oxide substrate. Zinc Oxide (ZnO) with its unique properties can be used as piezoelectric substrate along with SAW devices for detection of DNA in this research. In this project, ZnO thin film is deposited onto silicon oxide substrate using electron beam evaporation (E-beam) … Show more

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Cited by 13 publications
(4 citation statements)
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“…Utilizing a sonic or ultrasonic wave indirectly to drive an NG is an ideal choice for powering or facilitating the self-sufficient operation of a nanosystem. Furthermore, applying the ultrasonic waves through liquid media is an effective method to agitate NGs. , The size of NGs was 1 cm × 0.5 cm, which is much smaller than that of the water chamber. As revealed in Figure , the output current result instantly increased when the ultrasonic oscillator machine was opened on and then kept at the maximum value.…”
Section: Resultsmentioning
confidence: 99%
“…Utilizing a sonic or ultrasonic wave indirectly to drive an NG is an ideal choice for powering or facilitating the self-sufficient operation of a nanosystem. Furthermore, applying the ultrasonic waves through liquid media is an effective method to agitate NGs. , The size of NGs was 1 cm × 0.5 cm, which is much smaller than that of the water chamber. As revealed in Figure , the output current result instantly increased when the ultrasonic oscillator machine was opened on and then kept at the maximum value.…”
Section: Resultsmentioning
confidence: 99%
“…It can retain its hexagonal wurtzite structure and can be grown in polycrystalline and epitaxial nature [89], [90]. ZnO can be fabricated on a wide morphological setting [91]- [97], like in piezoelectrical transducers [94], [95]. The piezoelectric activity of ZnO, as well as other intriguing physical features, is owing to its unique crystal structure, which may be classified into three frameworks: rocksalt, zinc blende, and wurtzite.…”
Section: Zno Defects and Their Contributionmentioning
confidence: 99%
“…Furthermore, the coupling of ZnO piezoelectricity and semiconducting capabilities produced the so-called ''piezotronic effect.'' The charge carrier transport properties may be regulated and modified by the inner electric potential made in ZnO [95]. The idea of combining ZnO's unique characteristics with various morphologies has piqued researchers' interest in the material.…”
Section: Zno Defects and Their Contributionmentioning
confidence: 99%
“…Piezoelectricity is the conversion of mechanical stress into electrical energy. Piezoelectric materials include non-centrosymmetric crystals that reorient their molecular dipole moments under physical stress (15). Silk holds great potential as a platform for neuromodulation.…”
Section: Emilin Mathew Leya Joykuttymentioning
confidence: 99%