Charge Exchange of Cl<sup>-</sup> Ions with Atomic Chlorine

Here we demonstrate the oopd1 (object-oriented plasma device for one dimension) particle-in-cell/Monte Carlo simulation tool for a capacitively coupled chlorine discharge with a comprehensive reaction set. We apply a hybrid approach where a global model determines the dissociation fraction of the discharge. The simulation results are compared with available experimental measurements and good agreement is achieved. We explore a typical capacitively coupled chlorine discharge using oopd1 and obtain key plasma parameters, including particle density, effective electron temperature, electron energy probability function and ion energy and angular distributions for both Cl + and Cl + 2 ions. The dependence of the plasma parameters on the discharge pressure is systematically investigated. As the pressure increases from 5 to 100 mTorr, the heating mechanism evolves from both stochastic and Ohmic heating to predominantly Ohmic heating and the electron heating outweighs the ion heating at high pressures. Also, the density profile for Cl + 2 and Cl − ions becomes flat in the bulk region and the electronegativity increases with increasing pressure. The creation of Cl + ions in the sheath region is mainly due to conversion from Cl + 2 ions to Cl + ions through non-resonant charge exchange, while in the bulk region the creation of Cl + ions is mainly ascribed to electron impact ionization processes.

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“…we create a fit to the cross section calculated by Karmohapatro [53]. For the charge exchange between Cl + 2 ion and Cl atom,…”

Section: The Reaction Setmentioning

confidence: 99%

A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

Huang

Guðmundsson

2013

Plasma Sources Sci. Technol.

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Charge Exchange of Cl^- Ions with Atomic Chlorine

Cited by 1 publication

References 10 publications

A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

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Charge Exchange of Cl- Ions with Atomic Chlorine

Cited by 1 publication

References 10 publications

A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

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Product

Resources

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Charge Exchange of Cl^- Ions with Atomic Chlorine