1994
DOI: 10.1063/1.111088
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Charge transport in heavily B-doped polycrystalline diamond films

Abstract: Temperature-dependent conductivity and Hall measurements have been carried out on heavily in situ B-doped polycrystalline diamond films in a temperature range from ∼100 to 750 K. The slope of the conductivity is clearly non-Arrhenius leading to a pronounced tail at low temperatures. Carrier transport at low temperatures is dominated by variable range hopping. The activation energy decreases with increasing doping concentration and the most heavily doped diamond films show metallic behavior above room temperatu… Show more

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Cited by 98 publications
(38 citation statements)
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“…6 as a function of the boron concentration. In the figure, the activation energies reported for single crystalline diamond films [18][19][20] and polycrystalline diamond 46,47 with the conductivity and carrier concentration data discussed later. Fig.…”
Section: B1 High Temperature Regimementioning
confidence: 99%
See 2 more Smart Citations
“…6 as a function of the boron concentration. In the figure, the activation energies reported for single crystalline diamond films [18][19][20] and polycrystalline diamond 46,47 with the conductivity and carrier concentration data discussed later. Fig.…”
Section: B1 High Temperature Regimementioning
confidence: 99%
“…9 as a function of boron concentration, together with the theoretical predictions of ionized impurity scattering and grain boundary scattering expected for polycrystalline material. 49 The carrier mobility dependence on boron doping for single crystalline 46 and polycrystalline 47 diamond films have also been plotted in Fig. 9 for comparison.…”
Section: B1 High Temperature Regimementioning
confidence: 99%
See 1 more Smart Citation
“…Increasing the concentration to 10 20 cm −3 gradually decreases the activation energy 9,10 , and for n≥10 20 cm −3 , the electrical conductivity acquires metallic-like behaviour near room temperature [8][9][10][11] that signals an insulator-metal transition near this concentration. A metallic-like conductivity has not been found, however, at low temperatures for any presently available B concentration, which has reached (2-3)×10 21 cm −3 (refs 8-11).…”
mentioning
confidence: 99%
“…Electrical transport studies of B-doped diamond, including high-pressure synthesized crystals and CVD (chemical vapour deposition) films, find that low boron concentrations n≈10 17 -10 19 cm −3 give a semiconducting conductivity with an activation energy of ~0.35 eV (refs 7-11). Increasing the concentration to 10 20 cm −3 gradually decreases the activation energy 9,10 , and for n≥10 20 cm −3 , the electrical conductivity acquires metallic-like behaviour near room temperature [8][9][10][11] that signals an insulator-metal transition near this concentration. A metallic-like conductivity has not been found, however, at low temperatures for any presently available B concentration, which has reached (2-3)×10 21 cm −3 (refs 8-11).…”
mentioning
confidence: 99%