Charging effects of SiO2 thin film on Si substrate irradiated by penetrating electron beam

Li, Wei-Qin; Mu, Chao-Yi

doi:10.1016/j.micron.2020.102961

Cited by 6 publications

(4 citation statements)

References 22 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…One way to improve the surface properties is typically related to electron beam irradiation technique. It involves to use electron at high energy to treat an object for a variety of purpose, as indicated by Li et al [14]. Sokovnin et al [15] used this technique to modify the magnetic, thermal and luminescent properties of metal oxide particle.…”

Section: Introductionmentioning

confidence: 99%

Synthesis and modification of nickel hydroxide particle synthesized by self-assembly and electron beam irradiation technique for photocatalyst activity

SAECHIN,

SRIPHO,

RATTANAWONGWIBOON

et al. 2023

J Met Mater Miner

View full text Add to dashboard Cite

The purpose of this work is to study the methyl orange removal of Ni(OH)2 nanoparticles. The photo-catalyst activity is investigated based on UV lamp of 18 watt. Ni(OH)2 is synthesized by a self-assembly process and then exposed to electron beam radiation at 10 MeV energy with various doses ranging from 50 kGy to 500 kGy. The properties of Ni(OH)2 nanoparticles are then evaluated. No significant change of functional group and percent of crystallinity are observed. The morphology is uniformly presented as a plate-like. The specific surface area, pore size and pore volume are reduced. Point of zero charge confirmed that positive charge is presented onto the surface. It therefore provides strong affinity to negative charge of dye removal. As-synthesized Ni(OH)2 particle exhibits the excellent properties for methyl orange adsorption and photocatalyst activity over methyl orange degradation. It was remarkable to note that Ni(OH)2 particle is therefore considered as an excellent candidate for dye degradation in textile industry.

show abstract

Section: Introductionmentioning

confidence: 99%

Synthesis and modification of nickel hydroxide particle synthesized by self-assembly and electron beam irradiation technique for photocatalyst activity

SAECHIN,

SRIPHO,

RATTANAWONGWIBOON

et al. 2023

J Met Mater Miner

View full text Add to dashboard Cite

show abstract

“…With the progress of modern science and technology, the innovation of laser technology has penetrated various fields, such as science and technology, medical treatment, military affairs, and our lives. Among them, laser medical technology is developing rapidly, and it has achieved different degrees of success in both external laser surgery and internal laser ablation [1]. Since the world's first ruby laser was launched in 1960, this new light source and the resulting new laser technology have been applied to the medical field.…”

Section: Introduction 1laser Chemicalmentioning

confidence: 99%

Development of Wide-Angle Short-Wave Pass Thin Film Based on the Ultra-Thin Silicate Glass

Dong

Xiong

et al. 2022

Materials

View full text Add to dashboard Cite

With the rapid development of laser medicine, there are higher requirements placed on the performance of optical components in various medical systems. This paper is aimed at exploring the critical optical devices of medical equipment for treating periodontitis and gingivitis. The cathode sputtering method was used to produce the wide-angle short-wave pass filter, and a hundreds grid fastness test was conducted to detect the occurrence of film peeling. Considering the results of SEM, transmission spectrum, and stress test of the sample, an analysis was conducted as to the cause of poor bonding force for the film. By increasing the amount of argon gas and adjusting the baking temperature, the problem of film peeling was resolved. Besides, a short-wave pass filter film with good bonding and low roughness was obtained to meet the requirements of laser medical equipment.

show abstract

“…Due to its good chemical stability, optical properties, dielectric properties, abrasion resistance and corrosion resistance, silicon dioxide (SiO 2 ) thin films have received intensive attention within the technology and scientific community [1][2][3][4][5][6][7][8][9], and are widely used in micro-electro-mechanical systems, integrated circuits and optical devices [10][11][12][13][14][15]. Tremendous efforts have been devoted to studying the preparation technology and optical properties of the SiO 2 thin films [16][17][18][19], while little attention has been paid to their mechanical properties.…”

Section: Introductionmentioning

confidence: 99%

Experimental Study on the Thickness-Dependent Hardness of SiO2 Thin Films Using Nanoindentation

Zhang

Xing

et al. 2020

Coatings

View full text Add to dashboard Cite

SiO2 thin films are widely used in micro-electro-mechanical systems, integrated circuits and optical thin film devices. Tremendous efforts have been devoted to studying the preparation technology and optical properties of SiO2 thin films, but little attention has been paid to their mechanical properties. Herein, the surface morphology of the 500-nm-thick, 1000-nm-thick and 2000-nm-thick SiO2 thin films on the Si substrates was observed by atomic force microscopy. The hardnesses of the three SiO2 thin films with different thicknesses were investigated by nanoindentation technique, and the dependence of the hardness of the SiO2 thin film with its thickness was analyzed. The results showed that the average grain size of SiO2 thin film increased with increasing film thickness. For the three SiO2 thin films with different thicknesses, the same relative penetration depth range of ~0.4–0.5 existed, above which the intrinsic hardness without substrate influence can be determined. The average intrinsic hardness of the SiO2 thin film decreased with the increasing film thickness and average grain size, which showed the similar trend with the Hall-Petch type relationship.

show abstract

Charging effects of SiO2 thin film on Si substrate irradiated by penetrating electron beam

Cited by 6 publications

References 22 publications

Synthesis and modification of nickel hydroxide particle synthesized by self-assembly and electron beam irradiation technique for photocatalyst activity

Synthesis and modification of nickel hydroxide particle synthesized by self-assembly and electron beam irradiation technique for photocatalyst activity

Development of Wide-Angle Short-Wave Pass Thin Film Based on the Ultra-Thin Silicate Glass

Experimental Study on the Thickness-Dependent Hardness of SiO2 Thin Films Using Nanoindentation

Contact Info

Product

Resources

About