1991
DOI: 10.1063/1.349586
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Chemical etching-induced defects in phosphorus-doped silicon

Abstract: We have found with deep-level transient spectroscopy that chemical etching introduced three electron traps, E1(0.11), E2(0.13), and E3(0.15), in the near-surface region of phosphorus-doped crystalline silicon. The results on depth profiles of these traps and carriers suggested the donor character of the traps, but they hardly exhibited the Poole–Frenkel effect. From their correlations with carbon and oxygen, we propose a tentative identification that E1 and E2 traps arise from two kinds of hydrogen-oxygen-carb… Show more

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Cited by 72 publications
(31 citation statements)
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“…These results suggest that (C-H) II is a deep acceptor with a level at E c Ϫ0.16 eV. The acceptor nature of (C-H) II is in disagreement with the conclusions reached by Endrös et al 7 and Kamiura et al 9,19 …”
Section: A Formation Of C-h Complexescontrasting
confidence: 54%
“…These results suggest that (C-H) II is a deep acceptor with a level at E c Ϫ0.16 eV. The acceptor nature of (C-H) II is in disagreement with the conclusions reached by Endrös et al 7 and Kamiura et al 9,19 …”
Section: A Formation Of C-h Complexescontrasting
confidence: 54%
“…So far some point defects introduced during etching process were reported in crystalline silicon [16,17]. The hydrogen absorbed at the surface of silicon on chemical etching, diffused into the interior of silicon and trapped by the dopant and impurity atoms, and then the hydrogen-related complex defects were generated in silicon [17]. Therefore, we propose tentatively that both E1 and E2 traps arise from hydrogen-related defects.…”
Section: Introductionmentioning
confidence: 78%
“…These results indicate at this time either defects and/or impurities diffused from the sample surface into the bulk during the chemical etching. So far some point defects introduced during etching process were reported in crystalline silicon [16,17]. The hydrogen absorbed at the surface of silicon on chemical etching, diffused into the interior of silicon and trapped by the dopant and impurity atoms, and then the hydrogen-related complex defects were generated in silicon [17].…”
Section: Introductionmentioning
confidence: 99%
“…Hydrogen is introduced via wet chemical etching (acid solution) at around room temperature [161,162,163]. The amount of hydrogen introduced is very low and is confined to the surface region.…”
Section: Wet Etchingmentioning
confidence: 99%