a b s t r a c tRecombination active boron oxygen related defects typically limit the efficiency of solar cells made from boron doped, oxygen rich silicon. This limitation can be overcome by applying a regeneration process that requires slightly elevated temperatures, carrier injection, and the presence of hydrogen in the silicon substrate in order to regenerate quickly and completely.The influence of mid temperature steps up to 400 1C on the regeneration kinetics is investigated and the results can be explained with the efficacy of the regeneration process depending on the hydrogen bonding states prior to regeneration. Boron hydrogen pairs are found to be good candidates to be the relevant hydrogen source during regeneration. The long term stability of the regenerated state is tested under solar cell operating conditions, and the thermal activation energy of its destabilization is determined to be 1.25 70.05 eV.Limiting factors for high speed regeneration processes are discussed, and a high temperature/high illumination procedure is presented, allowing complete regeneration in less than 10 s. This makes regeneration feasible as an in line process in solar cell production.