1994
DOI: 10.1002/sia.740220116
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Chemical information from Auger data using factor analysis: Some examples

Abstract: Extracting chemical information from Auger data is an arduous task, particularly when signals result from the contribution of several components. The numerical method known as factor analysis (FA) can he powerful in enhancing the presence of poorly visible lineshape contributions and in quantification problems. Nevertheless FA is still little employed in Auger data handling. This paper deals with applications of Auger data factor analysis to the study of solid state reaction at oxide-oxide and metal-silicon in… Show more

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Cited by 8 publications
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“…Theoretically, as more of the raw data are used to estimate the composition, better precision in the composition determination should be possible. This approach has been pursued and extended by several authors who have studied, for example, oxidation states at interfaces (Chemelli 1994;Kooi & Somers 1994), the composition of alloys with overlapping Auger features in their spectra (Calliari et al 1994) and the analysis of carbides and nitrides (Reniers et al 1994). It is an extremely powerful approach for the extraction of the maximum amount of useful information from a set of Auger spectra.…”
Section: F Actor and Ta R G E T Factor A N A Ly Sismentioning
confidence: 99%
“…Theoretically, as more of the raw data are used to estimate the composition, better precision in the composition determination should be possible. This approach has been pursued and extended by several authors who have studied, for example, oxidation states at interfaces (Chemelli 1994;Kooi & Somers 1994), the composition of alloys with overlapping Auger features in their spectra (Calliari et al 1994) and the analysis of carbides and nitrides (Reniers et al 1994). It is an extremely powerful approach for the extraction of the maximum amount of useful information from a set of Auger spectra.…”
Section: F Actor and Ta R G E T Factor A N A Ly Sismentioning
confidence: 99%