Chemical mechanical polishing of titanium with colloidal silica containing hydrogen peroxide-mirror polishing and surface properties

Abstract

Chemical mechanical polishing (CMP) of cpTi (Ti) was carried out using two types of slurries, acidic and basic colloidal silica containing H2O2 up to 3 wt％, to obtain flat and mirror-polished surfaces without any contaminated and reacted layers. Polishing behavior and surface properties were investigated using AFM, EPMA, and XPS. Weight loss of Ti polished by CMP using the basic slurry was larger than that using the acidic one, and surface roughness was less than 2 nm RMS when basic slurry containing 3 wt％ H2O2 was used. Moreover, three kinds of chemical species, OH -, O 2-, and H2O, were detected on the Ti surfaces polished by CMP using these slurries. Results of this study showed that CMP using colloidal silica containing H2O2 successfully created a mirror-polished surface without contaminated and reacted layers.

Influence of solution pH, supporting electrolyte presence and solid content on the stability of aqueous nanosilica suspension

“…Its excellent polishing ability [1] is used for shaping and smoothing high-precision in semiconductor production and optical lenses preparation. SiO 2 also improves the hardness of decorative coatings, provides them with anti-soiling properties and delivers high pigment dispersion [2,3].…”

Superchiral Plasmonic Phase Sensitivity for Fingerprinting of Protein Interface Structure

“…However, since interfacial regions intrinsically contain small amounts of material, conventional chirally sensitive spectroscopic tools, routinely applied to characterize biomaterials, cannot be used due to lack of sensitivity. Consequently, routine laboratory based characterization of biointerfaces is generally provided by atomic force microscopy (AFM), which uses topographical and mechanical properties to establish the macromolecular shape of the molecules based on correlation averaged image reconstruction. , However, rapid detection of subtle structural and orientation differences between similar molecules with AFM can be challenging. Here, we report a plasmonic phenomenon which is based on the sensitivity of phase retardation effects in plasmonic transparency on the spatial arrangement of protein molecules within the near-field.…”

Combined Influence of Fluoride and Biofilms on the Biotribocorrosion Behavior of Titanium Used for Dental Applications

“…Ground surfaces were created using SiC papers ranging from 600 to 1200 mesh, reaching an average roughness (R a ) of about 0.4 lm. For polished surfaces, SiC papers were used down to 2400 mesh, and samples were additionally polished with an OP-Chem polishing cloth, wetted with an OP-S colloidal silica (SiO 2 ) suspension with a mean grain size of 0.25 lm with the addition of 15 % hydrogen peroxide (H 2 O 2 ) as reported in [33]. Mirror-like surfaces were obtained with R a & 0.04 lm.…”