2015
DOI: 10.1039/c5ee01254f
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Chemical vapor deposition and atomic layer deposition for advanced lithium ion batteries and supercapacitors

Abstract: Recent developments and applications of atomic layer deposition and chemical vapor deposition in energy storage devices are reviewed.

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Cited by 254 publications
(151 citation statements)
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“…20,55 Coatings can be vapor deposited on the cathode half cell, which is a composite of the active cathode powder with polymeric binder and conductive carbon, during cell assembly. [76][77][78][79][80] Vapor deposition coats the pores of the cathode layer, where the electrolyte is later injected.…”
Section: Discussion: Coating Depositionmentioning
confidence: 99%
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“…20,55 Coatings can be vapor deposited on the cathode half cell, which is a composite of the active cathode powder with polymeric binder and conductive carbon, during cell assembly. [76][77][78][79][80] Vapor deposition coats the pores of the cathode layer, where the electrolyte is later injected.…”
Section: Discussion: Coating Depositionmentioning
confidence: 99%
“…We considered fully lithiated cathode/coating pairs under stable equilibrium at 500 K and 1,000 K, reflecting conditions of coating deposition and heattreatment respectively. 55 To account for elevated temperatures, we consider the (temperature-dependent) free energy of O 2 , while the free energies of solid phases were maintained at their 0 K values. When kinetic barriers constrain a system from reaching the true stable equilibrium, the system can retain a state of metastable equilibrium, which is not a global but a local energy minimum.…”
Section: Methodsmentioning
confidence: 99%
“…ALD Al 2 O 3 is generally used for this application and it has been found that a few ALD cycles can improve the cycling capability and capacity retention of the electrodes [80,81]. These results will not be discussed further here but the reader is advised that a lot of literature on this subject is available [80][81][82][83]. Some examples of ALD-made metal fluorides as artificial SEI layers will be shortly mentioned in Section 5.…”
Section: Atomic Layer Deposition Of Conventional Lithium-ion Battery mentioning
confidence: 99%
“…In recent years, ALD has also been studied extensively as a method to modify the interfaces between the electrodes and the electrolyte by forming an artificial SEI-layer [75,80,81]. ALD Al 2 O 3 is generally used for this application and it has been found that a few ALD cycles can improve the cycling capability and capacity retention of the electrodes [80,81]. These results will not be discussed further here but the reader is advised that a lot of literature on this subject is available [80][81][82][83].…”
Section: Atomic Layer Deposition Of Conventional Lithium-ion Battery mentioning
confidence: 99%
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