Chemical Vapor Deposition of Diamond:  An in Situ Study by Vibrational Spectroscopy

Heerwagen, Arndt; Strobel, M.; Himmelhaus, Michael; Buck, Manfred

doi:10.1021/ja016056q

Cited by 7 publications

(3 citation statements)

References 29 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Infrared-visible sum frequency generation (SFG) has been used to probe vibrations of species on surfaces or of films, with minimal interference from thermal HERMAN emission or the gas phase (183,184), and in related studies of catalysis at high pressure (185) and polymers (186). SFG during diamond deposition suggests that there is CH at the surface, but no detectable steady-state CH 3 (187).…”

Section: Other Surface Sensitive Methodsmentioning

confidence: 99%

Optical Diagnostics for Thin Film Processing

Herman

2003

Annu. Rev. Phys. Chem.

View full text Add to dashboard Cite

Optical diagnostics are used to probe the plasma or neutral gas above the substrate, particles in the gas or on the surface, the film surface and reactor walls, the film itself, and the substrate during thin film processing. The development and application of optical probes are highlighted, in particular for analyzing plasma/gas phase intermediates and products and film composition, and performing metrology, thermometry, and endpoint detection and control. Probing etching (particularly plasma etching) and deposition (particularly epitaxy) are emphasized.

show abstract

Section: Other Surface Sensitive Methodsmentioning

confidence: 99%

Optical Diagnostics for Thin Film Processing

Herman

2003

Annu. Rev. Phys. Chem.

View full text Add to dashboard Cite

show abstract

“…Somewhat in agreement with this mechanism are the , 87 who used vibrational spectroscopy to study diamond growth in situ; these authors have argued that the dominating species on the surface must be a tertiary carbon atom with just a single C-H bond. Moreover, they have reported that no sign of CH 3 species at the surface could be identified; recalling that the methyl radical has been considered an essential species in diamond growth, other species (such as acetylene) would be responsible.…”

Section: ''Hot Filament'' Cvdmentioning

confidence: 82%

“…Alternatively, one could assume that methyl radicals react so quickly that their concentration is below the detection threshold: this is the opinion of the authors of ref. 87, based on the absence of any significant signal attributable to acetylene.…”

Section: ''Hot Filament'' Cvdmentioning

confidence: 99%

Synthesis of diamond

Ferro

2002

J. Mater. Chem.

View full text Add to dashboard Cite

Diamond is impressive because of its wide range of extreme properties. By most measures, diamond is 'the biggest and best': it is the hardest known material, has the lowest coefficient of thermal expansion, is chemically inert and wear resistant, offers low friction, has high thermal conductivity, and is electrically insulating and optically transparent from the ultraviolet to the far infrared. Diamond already finds use in many different applications including, of course, its use as a precious gem, but also as a heat sink, as an abrasive, and as inserts and/or wear-resistant coatings for cutting tools. Obviously, it is possible to envisage many other potential applications for diamond as an engineering material, but progress in implementing many such ideas has been hampered by the comparative scarcity of natural diamond. This paper reports on the progress of the long running quest for ways to synthesize diamond in the laboratory

show abstract

Homoepitaxial Diamond Growth by Plasma-Enhanced Chemical Vapor Deposition

Tokuda¹

2019

Topics in Applied Physics

View full text Add to dashboard Cite

Chemical Vapor Deposition of Diamond: An in Situ Study by Vibrational Spectroscopy

Cited by 7 publications

References 29 publications

Optical Diagnostics for Thin Film Processing

Optical Diagnostics for Thin Film Processing

Synthesis of diamond

Homoepitaxial Diamond Growth by Plasma-Enhanced Chemical Vapor Deposition

Contact Info

Product

Resources

About