The quality of a Ni-LIGA layer and its adhesion to TiO 2 depend crucially on interface morphology and chemistry. The unique combination of ARXPS (angle resolved photo electron spectroscopy), STM (Scanning tunnel microscopy) and DTS (distance tunnel spectroscopy) yield new insights in morphology and stoichiometry on the porous TiO 2 plating ground, on the TiO 2\x (OH) y NiO z Ni interface, and on the Ni-nucleation and growth. Aside TiO 2 -pore dimension, we identified graphite hillocks, with retarded Ni coverage, the adhesion promoting interface oxide TiO 2\x (OH) y Ni z and the Ni nuclei and their expansion.

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