Morphology and Nucleation of Ni‐TiO
            <sub>2</sub>
            LIGA layers

Strobel, M.; Schmidt, Udo; Bade, K.; Halbritter, J.

doi:10.1002/9783527612154.ch17

Electrochemical Nanotechnology 1998

DOI: 10.1002/9783527612154.ch17

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Morphology and Nucleation of Ni‐TiO ₂ LIGA layers

M. Strobel¹,

Udo Schmidt²,

K. Bade³

et al.

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2007

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Fatigue of LIGA Ni Micro-Electro-Mechanical System Thin Films

Yang

Allameh

Lou

et al. 2007

Metall Mater Trans A

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This article presents the results of an experimental study of the mechanisms of fatigue in 270-lm-thick LIGA (lithographic, galvanoformung, abformung) Ni micro-electro-mechanical systems (MEMS) thin films with columnar microstructure. Stress-life behavior is compared with the previously reported data for LIGA Ni MEMS films and bulk Ni. The LIGA Ni thin films are shown to have comparable fatigue lives to bulk annealed Ni. The underlying mechanisms of fatigue crack growth are elucidated via scanning electron and focused ion beam (FIB) microscopy. Stress-driven recrystallization was revealed near the fatigue crack-tip using FIB microscopy. Microvoids were also found to form and coalesce in the recrystallized grains. This led to subsequent fatigue crack growth at the microscopic and macroscopic scales. The crack profiles revealed that fatigue crack growth was retarded by crack deflection and branching. The implications of the results are then discussed for the analyses of fatigue in nickel MEMS structures.

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Fatigue of LIGA Ni Micro-Electro-Mechanical System Thin Films

Yang

Allameh

Lou

et al. 2007

Metall Mater Trans A

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Morphology and Nucleation of Ni‐TiO ₂ LIGA layers

Cited by 1 publication

References 6 publications

Fatigue of LIGA Ni Micro-Electro-Mechanical System Thin Films

Fatigue of LIGA Ni Micro-Electro-Mechanical System Thin Films

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Morphology and Nucleation of Ni‐TiO 2 LIGA layers

Cited by 1 publication

References 6 publications

Fatigue of LIGA Ni Micro-Electro-Mechanical System Thin Films

Fatigue of LIGA Ni Micro-Electro-Mechanical System Thin Films

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Morphology and Nucleation of Ni‐TiO ₂ LIGA layers