2020
DOI: 10.1126/science.abb7023
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Chemical vapor deposition of layered two-dimensional MoSi 2 N 4 materials

Abstract: Identifying two-dimensional layered materials in the monolayer limit has led to discoveries of numerous new phenomena and unusual properties. We introduced elemental silicon during chemical vapor deposition growth of nonlayered molybdenum nitride to passivate its surface, which enabled the growth of centimeter-scale monolayer films of MoSi2N4. This monolayer was built up by septuple atomic layers of N-Si-N-Mo-N-Si-N, which can be viewed as a MoN2 layer sandwiched between two Si-N bilayers. This material exhibi… Show more

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Cited by 754 publications
(614 citation statements)
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“…In the calculation, norm-conserving pseudopotential, double-zeta polarization basis set and exchange-correlation functional at PBE level are employed. 3.470 Å and 3.620 Å for Z = P and As, respectively, which are well coincident with those predicted in previous work [18]. Figure 1b-d present three most likely stacking patterns of bilayer MoSi 2 Z 4 , namely AA, AB and AC, where the Si atoms in the lower layer are aligned with the Si, Z, and Mo atoms in the upper layer, respectively.…”
Section: Methodssupporting
confidence: 89%
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“…In the calculation, norm-conserving pseudopotential, double-zeta polarization basis set and exchange-correlation functional at PBE level are employed. 3.470 Å and 3.620 Å for Z = P and As, respectively, which are well coincident with those predicted in previous work [18]. Figure 1b-d present three most likely stacking patterns of bilayer MoSi 2 Z 4 , namely AA, AB and AC, where the Si atoms in the lower layer are aligned with the Si, Z, and Mo atoms in the upper layer, respectively.…”
Section: Methodssupporting
confidence: 89%
“…It presents A-B stacked hexagonal lattice from the top view, and its primitive cell includes one Mo atom, two Si atoms and four Z atoms as labeled by the parallelogram in Figure1a. The lattice parameters a = b = 3.470 Å and 3.620 Å for Z = P and As, respectively, which are well coincident with those predicted in previous work[18]. Figure1b-d present three most likely stacking patterns of bilayer MoSi 2 Z 4 , namely AA, AB and AC, where the Si atoms in the lower layer are aligned with the Si, Z, and Mo atoms in the upper layer, respectively.…”
supporting
confidence: 86%
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“…in the bottom‐up synthesis of novel 2D vdW materials without known 3D parent crystals. They introduced Si as the passivating element during chemical vapor deposition (CVD) of non‐layered molybdenum nitride, which surprisingly enabled the growth of monolayer films of a new vdW 2D material, MoSi 2 N 4 [10] . The structure of MoSi 2 N 4 can be viewed as inserting a MoN 2 layer between two Si−N bilayers.…”
Section: Introductionmentioning
confidence: 99%