2018
DOI: 10.1016/j.spmi.2018.05.049
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Chemical vapor deposition of monolayer MoS2 on sapphire, Si and GaN substrates

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Cited by 25 publications
(11 citation statements)
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“…Measurements were done both at liquid He and room temperature; one can be assured that excitonic effects in ML TMDs are strong within these operating conditions . Triangular ML-MoS 2 samples were prepared by chemical vapor deposition (CVD) on a sapphire substrate, expectedly resulting in the growth of high-quality MoS 2 , due to the commensurability of both materials’ lattices. The MoS 2 sample was then wet-transferred onto an ML h-BN on SiO 2 /Si substrate (Figure a), which is a typical substrate used in many applications because of its suitability to Si-based electronics.…”
Section: Resultsmentioning
confidence: 99%
“…Measurements were done both at liquid He and room temperature; one can be assured that excitonic effects in ML TMDs are strong within these operating conditions . Triangular ML-MoS 2 samples were prepared by chemical vapor deposition (CVD) on a sapphire substrate, expectedly resulting in the growth of high-quality MoS 2 , due to the commensurability of both materials’ lattices. The MoS 2 sample was then wet-transferred onto an ML h-BN on SiO 2 /Si substrate (Figure a), which is a typical substrate used in many applications because of its suitability to Si-based electronics.…”
Section: Resultsmentioning
confidence: 99%
“…We deposited 5 nm films of Al 2 O 3 on the Si structures. We chose Al 2 O 3 as it is one of the widely used substrates for the CVD growth of TMDs [68][69][70][71][72][73][74]. This thickness, which is larger than the exciton radius provides good electronic separation.…”
Section: Resultsmentioning
confidence: 99%
“…Their atomically flat surface may also aid precursor migration during CVD, enhancing the thickness homogeneity of the MoS 2 layers produced. 12 Additionally, the close in-plane lattice match of MoS 2 and GaN with only 0.7 percent lattice mismatch 13 and similar hexagonal arrangement 14 have gained the interest of researchers to explore this particular heterostructure as a promising platform for electronic devices.…”
Section: Introductionmentioning
confidence: 99%