Mixed O,S‐bis‐ and tris(trimethylsilyl) esters of dithiophosphoric, aryldithiophosphonic and trithiophosphoric acids, 3, 7a–c, and 9, respectively, were obtained by the reactions of tetraphosphorus decasulfide 1 and 1,3,2,4‐dithiadiphosphetane‐2,4‐disulfides 6a–c and 8 with bis(trimethylsilyl)acetamide 2. © 2000 John Wiley & Sons, Inc. Heteroatom Chem 11:276–280, 2000