ChemInform Abstract: RK. DES TETRAFLUORHYDRAZINS 5. MITT. ALLYLDIFLUORAMINIERUNG

Фокин, А. В.; Zimin, V. I.; Studnev, Yu. N.; Kuznetsova, L. D.

doi:10.1002/chin.197120299

Chemischer Informationsdienst. Organische Chemie

1971

DOI: 10.1002/chin.197120299

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ChemInform Abstract: RK. DES TETRAFLUORHYDRAZINS 5. MITT. ALLYLDIFLUORAMINIERUNG

А. В. Фокин¹,

V. I. Zimin²,

Yu. N. Studnev³

et al.

Abstract: Eine 6stündige Reaktion des Isobutens (I) mit Tetrafluorhydrazin bei 90°C und Atmosphärendruck liefert überwiegend das Difluoraminoisobuten (II) (Ausbeute 40%).

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1977

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OrganicN-Fluoroimines

Fokin¹,

Uzun²,

Stolyarov³

1977

Russ. Chem. Rev.

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Laser-induced backside wet etching (LIBWE) is an indirect etchingtechnique that was first demonstrated for fused silica applying a pyrene doped hydrocarbon solution and was recently demonstrated for gallium as a highly absorbing liquid. In this study the etching of fused silica with mercury as liquid absorber is demonstrated using a nanosecond UV laser (excimer laser λ = 248 nm, 25 ns pulses) radiation. The high absorption coefficient of mercury enforces the absorption of the UV laser radiation within a 100 nm region near the solid interface so that, despite the high reflectivity, the threshold for etching was measured to be 0.76 J cm −2 . With rising laser fluence the etch rate increases nearly linearly in the whole laser fluence range and reaches a value of 650 nm/pulse at a laser fluence of about 10 J cm −2 . The etched surfaces were investigated by scanning electron microscopy, atomic force microscopy and interference microscopy and show well defined etch groove edges and a flat, smooth etched bottom that features an rms roughness of about 2.2 nm. The laser-induced backside etching of fused silica with mercury combines a low etching threshold, high etch rates and a still smooth etching of well-defined patterns into material surfaces.

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OrganicN-Fluoroimines

Fokin¹,

Uzun²,

Stolyarov³

1977

Russ. Chem. Rev.

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ChemInform Abstract: RK. DES TETRAFLUORHYDRAZINS 5. MITT. ALLYLDIFLUORAMINIERUNG

Abstract: Eine 6stündige Reaktion des Isobutens (I) mit Tetrafluorhydrazin bei 90°C und Atmosphärendruck liefert überwiegend das Difluoraminoisobuten (II) (Ausbeute 40%).

Cited by 1 publication

References 0 publications

OrganicN-Fluoroimines

OrganicN-Fluoroimines

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