Chemistry and formation process of Ga(Al)As oxide during local anodic oxidation nanolithography

Lazzarino, Marco; Mori, G.; Sorba, L.; Ercolani, Daniele; Biasiol, G.; Heun, S.; Locatelli, Andrea

doi:10.1016/j.susc.2006.01.086

Cited by 8 publications

(3 citation statements)

References 14 publications

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“…One can deposited by Chemical Vapour Deposition CVD, Physical Vapour Deposition PVD or Physical Vapour Transport PVT methods. One can use Local Anodic Oxidation LAO by applying AFM equipment (Matsuzaki et al, 2000;Lazzarino et al, 2005;Lazzarino et al, 2006) to GaAs or GaN surface oxidizing and creating small regions covered by gallium oxide. As was told earlier in chapter 2, the best parameters for semiconductor devices has monoclinic -Ga 2 O 3 .…”

Section: Discussionmentioning

confidence: 99%

Wet Thermal Oxidation of GaAs and GaN

Korbutowicz¹,

Prazmowska²

2010

Semiconductor Technologies

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Section: Discussionmentioning

confidence: 99%

Wet Thermal Oxidation of GaAs and GaN

Korbutowicz¹,

Prazmowska²

2010

Semiconductor Technologies

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“…The authors observed more or less strong surface reduction under irradiation with a micro-focused soft x-ray beam on SrTiO 2 , ZrO 2 , CeO 2 , and TiO 2 [68,69]. Experiments on oxide nanostructures obtained by local anodic oxidation (LAO) on GaAs and GaAs/AlAs/GaAs demonstrated that prolonged irradiation with soft x-rays (130 eV) can remove several layers of material, and eventually lead to the desorption of the whole LAO oxide [70][71][72][73][74].…”

Section: Oxide Surfaces and Interfacesmentioning

confidence: 99%

Recent advances in chemical and magnetic imaging of surfaces and interfaces by XPEEM

Locatelli

Bauer

2008

J. Phys.: Condens. Matter

143

114

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Synchrotron-based photoemission electron microscopy (XPEEM) is one of the most powerful spectro-microscopic techniques for the investigation of surfaces, interfaces, thin films and buried layers. By exploiting the tunability and polarizability of x-ray sources as well as progress in electron optics design, modern XPEEM instruments can perform several x-ray spectroscopic investigations with a lateral resolution of a few tens of nanometres. We review here the latest developments in XPEEM, illustrating the state of the art capabilities of the technique. The usefulness of chemical and magnetic imaging XPEEM methods is demonstrated by examples of fundamental and applied studies in surface and material sciences, as well as other fields of application ranging from magnetism to biology and geology.

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“…In AFM local anodic oxidation (LAO), the negatively biased tip induces simultaneous oxide growth on conductive surfaces. It is suggested that the oxidation mechanism and kinetics are closely related to electrical field, surface stress, water meniscus, and OH-diffusion, etc. − Ultrathin oxide patterns, thickness ≤5.0 nm, have been fabricated on a silicon surface using AFM oxidation. , Besides being a powerful fabrication tool to grow oxide, AFM is also a good technique to measure adhesive forces and friction between surfaces in the nanometer scale. Adhesive forces come from two sources: contact interfacial forces and noncontact forces such as van der Waals or electrostatic forces.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Adhesion Measurement of a Nanotextured Surface with Ionic Liquid Monolayers

Huang

Pan

et al. 2011

J. Phys. Chem. C

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A new approach is presented to fabricate an adhesion-controlled surface by means of local anodic oxide (LAO) lithography combined with ion exchange of ionic liquid. In this research, the nanometer-sized textures are first fabricated using a conductive atomic force microscopy based local anodic oxide method. Ionic liquid molecules were then self-assembled onto the matrix layer of silicon dioxide texture. The adhesive force of the surface was controlled by the formation of a self-assembled monolayer modified texture and ion exchange on the surface. Furthermore, adhesive characterization of ionic liquid and texture layers was investigated with a colloidal probe method. This approach can be readily extended to other conductive substrates, which have potential applications in the fields of detecting or sensing.

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Chemistry and formation process of Ga(Al)As oxide during local anodic oxidation nanolithography

Cited by 8 publications

References 14 publications

Wet Thermal Oxidation of GaAs and GaN

Wet Thermal Oxidation of GaAs and GaN

Recent advances in chemical and magnetic imaging of surfaces and interfaces by XPEEM

Fabrication and Adhesion Measurement of a Nanotextured Surface with Ionic Liquid Monolayers

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