Chirp-Kalibriernormale für Oberflächenmessgeräte (Chirp Calibration Standards for Surface Measuring Instruments)

Abstract

In diesem Beitrag wird ein "Chirp"-Oberflächennormal vorgestellt. Es ist dafür vorgesehen, mit einer Serie von verschiedenen Ortsfrequenzen das Übertragungsverhalten von Oberflächenmessgeräten zu testen. Die Topografie des Normals enthält eine abgestufte Folge von Sinuswellen, deren Abstände, Steigungen und Krümmungen durch den Synthese-und Fertigungsprozess genau bekannt sind. Die Oberfläche des Normals wird durch einen Diamant-Drehprozess hergestellt. Bei der Erzeugung der NC-Steuerdaten wird mittels morphologischer Operationen der Einfluss der Werkzeuggeometrie berücksichtigt. Erste Ergebnisse von Messungen am Chirp-Normal mit Interferenzmikroskopen und Tastschnittgeräten werden gezeigt.In this article a chirp-calibration standard is presented. It is intended to test the function transfer of surface measuring instruments by a series of different space scaled frequencies. The standard contains a sequence of sinusoidal waves, the distance, slopes and curvatures of which are well known from the design and the manufacturing process. The surface of the specimen is manufactured by a single diamond turning process. The control data take into account the influence of the cutting tool by morphological operations. First results of measurements on the chirp standard by both a contact stylus instrument and an interference microscope are presented.

Calibration and verification of areal surface texture measuring instruments

“…A second online list of material measures used for calibrating scanning probe microscopes (SPMs) and optical instruments can be found at www.nanoscale.de/standards.htm. Ritter et al [151] have developed a ''landmark'' material measure to compliment the list of material measures available for the calibration of SPMs [194], and Krü ger-Sehm et al [108] and Fujji et al [46] produce chirped-grating material measures for testing lateral resolution and determining the instrument transfer function (see Sections 7,8 and 9).…”

“…One method is to determine the lateral period limit of a coherence scanning interferometer using the instrument transfer function (see Section 9), which has been computed from the measurement of a step-height [33]. The lateral period limit can be estimated using one-dimensional gratings [109], sinusoidal artefacts with different spatial wavelengths, such as the 'chirped artefact' characterised by uniform amplitude [108] or with varying amplitudes [46]. However, work on the analysis of such structures is still under development.…”

Sensor characterization by comparative measurements using a multi-sensor measuring system

“…In the case of the coarse chirp the spatial wavelengths are in a range of 91 to 10 µm and in a range of 12 to 4.3 µm for the fine chirp (Brand et al, 2016). Such a chirp calibration standard can be used to describe the transfer behaviour at different spatial wavelengths (Krüger-Sehm et al, 2007;Seewig et al, 2014). To represent the measured amplitude as a function of the spatial wavelength, the so-called instrument transfer function (ITF) can be used (de Groot and de Lega, 2006).…”

Calibration sample for arbitrary metrological characteristics of optical topography measuring instruments

“…Furthermore, the surface texture parameters a S and q S are evaluated in order to additionally characterize the height axis of the examined measuring device. For the measurement of the topography fidelity FI T , a chirp-standard (type CIN [22]) is used as suggested by Seewig et al who introduced an according evaluation and calibration routine [23]. However, currently there is not yet an agreement on the standardization of the fidelity calibration and the determination of according parameters.…”