Choosing the electrode material for the fast electrochemical actuator

Shlepakov, P. S.; Uvarov, Ilia V.; Наумов, В. В.; Svetovoy, V. B.

doi:10.1088/1742-6596/1695/1/012155

Cited by 2 publications

(1 citation statement)

References 12 publications

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“…Each chamber has two electrodes inside. The electrode material is a 500 nm thick conductive layer of aluminum covered with a 200 nm thick titanium layer, which demonstrates very good stability in the AP electrolysis [34]. The chambers are sealed with thin silicon nitride films acting as membranes.…”

Section: Design Of the Pumpmentioning

confidence: 99%

A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing

et al. 2021

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Microfluidic devices providing an accurate delivery of fluids at required rates are of considerable interest, especially for the biomedical field. The progress is limited by the lack of micropumps, which are compact, have high performance, and are compatible with standard microfabrication. This paper describes a micropump based on a new driving principle. The pump contains three membrane actuators operating peristaltically. The actuators are driven by nanobubbles of hydrogen and oxygen, which are generated in the chamber by a series of short voltage pulses of alternating polarity applied to the electrodes. This process guaranties the response time of the actuators to be much shorter than that of any other electrochemical device. The main part of the pump has a size of about 3 mm, which is an order of magnitude smaller in comparison with conventional micropumps. The pump is fabricated in glass and silicon wafers using standard cleanroom processes. The channels are formed in SU-8 photoresist and the membrane is made of SiNx. The channels are sealed by two processes of bonding between SU-8 and SiNx. Functionality of the channels and membranes is demonstrated. A defect of electrodes related to the lift-off fabrication procedure did not allow a demonstration of the pumping process although a flow rate of 1.5 µl/min and dosage accuracy of 0.25 nl are expected. The working characteristics of the pump make it attractive for the use in portable drug delivery systems, but the fabrication technology must be improved.

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Section: Design Of the Pumpmentioning

confidence: 99%

A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing

et al. 2021

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Thermocavitation in gold-coated microchannels for needle-free jet injection

Schoppink,

Rivera Bueno,

Fernandez Rivas

2024

Physics of Fluids

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Continuous-wave lasers generated bubbles in microfluidic channels are proposed for applications such as needle-free jet injection due to their small size and affordable price of these lasers. However, water is transparent in the visible and near-IR regime, where the affordable diode lasers operate. Therefore, a dye is required for absorption, which is often unwanted in thermocavitation applications, such as vaccines or cosmetics. In this work, we explore a different mechanism of the absorption of optical energy. The microfluidic channel wall is partially covered with a thin gold layer, which absorbs light from a blue laser diode. This surface absorption is compared with the conventional volumetric absorption by a red dye. The results show that this surface absorption can be used to generate bubbles without the requirement of a dye. However, the generated bubbles are smaller and grow slower when compared to the dye-generated bubbles. Furthermore, heat dissipation in the glass channel walls affects the overall efficiency. Finally, degradation of the gold layer over time reduces the reproducibility and limits its lifetime. Further experiments and simulations are proposed to potentially solve these problems and optimize the bubble formation. Our findings can inform the design and operation of microfluidic devices used in phase transition experiments and other cavitation phenomena, such as jet injectors or liquid dispensing for bio-engineering.

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Choosing the electrode material for the fast electrochemical actuator

Cited by 2 publications

References 12 publications

A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing

A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing

Thermocavitation in gold-coated microchannels for needle-free jet injection

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