Classification of Thin-Film Structure Relief Self-Organization Degree by 2d Dfa and Ami Method

Study of Correlations in the Relief of Complex Surfaces Using the Example of Amorphous Hydrogenated Silicon

“…The analysis of the results obtained using the scale-space, 2D DFA and AMI methods is carried out taking into account the criteria for determining the structural complexity of the surface of solid-state materials, classification of the values of α, Ψ OR and Ψ IC [8].…”

“…3) up to the first inflection of the fluctuation function, as well as the values of AMI (Ψ OR ) and MMII (Ψ IC ) obtained from the distribution of mutual information. According to Table 1, it can be seen that the values of Ψ IC fall into various categories of information capacity [8]: the "Stochastic fractal" surface refers to structures with high information capacity (Ψ IC >0.7), the surface of the experimental sample -with low information capacity (Ψ IC <0.5), and the surfaces "Particles", "Gaussian noise" and "Addition" -with average information capacity (0.5<Ψ IC <0.7). The value of the information capacity of the surface of the experimental sample is closest to the Ψ IC surface "Addition".…”

“…The value of the information capacity of the surface of the experimental sample is closest to the Ψ IC surface "Addition". By the value of Ψ OR , the "Stochastic fractal" surface falls into the category of [8] structures with average ordering (0.02<Ψ OR <0.1), and the restwith low ordering. In this case, the value of the degree of ordering at the surface of the experimental sample is closest to the value Ψ OR of the surface "Particles" than the surface "Addition".…”