Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes

Chiou, Jin-Chern; Lin, Yu‐Chen; Wu, Shuen-De

doi:10.1109/omems.2002.1031455

Cited by 5 publications

(4 citation statements)

References 3 publications

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“…SMC operates by lots of switching pulses that can result in chattering of the actuated device about the steady state value. Chiou et al [32] examine the use of fuzzy control for a micromirror that is actuated using an array of electrodes that allow for a large number of positions using programmed digital operation. The fuzzy controller showed improvement in the transient response over the open-loop system in simulation, but issues concerning feedback signal and controller implementation are not addressed.…”

Section: Other Methodsmentioning

confidence: 99%

Feedback Control of MEMS Micromirrors Subject to Parametric Uncertainty

Bronson

Wiens

2007

Volume 3: 19th International Conference on Design Theory and Methodology; 1st International Conference on Micro- And Nanosystem

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This paper presents research on the development of microelectromechanical systems (MEMS) micromirror arrays with precise and accurate positioning enabled by the use of closed-loop control techniques. The MEMS mirror arrays are one degree-of-freedom, electrostatically actuated and exhibit nonlinear actuation profiles that include pull-in and hysteresis. The device performance is subject to parametric uncertainties from the fabrication process. Preliminary proportional-integrator (PI) controllers are studied in simulation on the nonlinear system to explore issues in the control development. Two different model linearization methods are presented to examine the best way to approximate the nonlinear behaviors using linear models. The effects of parametric uncertainties on the open-loop plant response are considered. It is evident based on these studies that the open-loop response is very sensitive to model uncertainties, while using closed-loop control can achieve input-tracking despite uncertainties in the plant. The work-in-progress includes the development of an optical test bed for the experimental validation of the results presented in this paper.

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Section: Other Methodsmentioning

confidence: 99%

Feedback Control of MEMS Micromirrors Subject to Parametric Uncertainty

Bronson

Wiens

2007

Volume 3: 19th International Conference on Design Theory and Methodology; 1st International Conference on Micro- And Nanosystem

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“…In this aspect, some feedback control algorithms have been proposed and implemented. Chiou et al [2] proposed a control algorithm in which they divided the largesingle electrode into multiple independent small electrodes. The small electrodes were then activated independently to achieve different voltage-angle relations.…”

Section: Torsional Micromirrorsmentioning

confidence: 99%

“…For efficient and fast operations, a microdevice has to achieve the desired static configuration with excellent transient dynamic characteristics. To achieve this requirement, microdevices are often redesigned [1,2]. However, the redesign approach can be costly, time-consuming, and usually results in more complex devices.…”

Section: Introductionmentioning

confidence: 99%

Input-shaping control of nonlinear MEMS

2007

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We develop a new technique for preshapcal systems (MEMS). In general, MEMS are excited using an electrostatic field which is a nonlinear function of the states and the input voltage. Due to the nonlinearity, the frequency of the device response to a step input depends on the input magnitude. Therefore, traditional shaping techniques which are based on linear theory fail to provide good performance over the whole input range. The technique we propose combines the equations describing the static response of the device, an energy balance argument, and an approximate nonlinear analytical solution of the device response to preshape the voltage commands. As an example, we consider set-point stabilization of an electrostatically actuated torsional micromirror. The shaped commands are applied to drive the micromirror to a desired tilt angle with zero residual vibrations. Simulations show that fast mirror switching operation with almost zero overshoot can be realized using this technique. The proposed methodology accounts for the energy of the significant higher modes and can be used to shape input commands applied to other nonlinear micro-and macro-systems.

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“…Flip-chip packaging had been developed and applied to many MEMS designs over the last decade [18]- [20]. It is frequently used to transfer MEMS structures to other substrates that provided MEMS designers a new capability to integrate different structures and substrates.…”

Section: A Flip Chip Packagingmentioning

confidence: 99%

The design and assembly of surface-micromachined optical switch for optical add/drop multiplexer application

Lin

Chiou

Lin

et al. 2003

IEEE Trans. Adv. Packag.

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An assembly process including: flip-chip bonding, microelectromechanical (MEMS) structure release, and atomic layer deposition (ALD) is proposed to integrate a surface micromachined optical switch for optical add/drop multiplexer (OADM) applications. In the current optical switch designs, pre-stressed beams were used to pop up the micromirror and an electrode (substrate) under the beams was designed to perform ON/OFF function of the optical switch. In order to achieve desired popped-up angle for precise optical switching, a flip-chip bonding technique is applied to a mechanical stopper with an accurate joint height that can be used to constrain the movement of the micromirror. A conformal thin layer of dielectric material (Al 2 O 3 ) coated on the surfaces of device through an ALD coating process is used to improve vertical actuation force, as well as electrical isolation. Experiments indicate that the micromirrors fabricated by the present assembly process can achieve desired angle that meet the requirements of the proposed OADM configuration.

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Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes

Cited by 5 publications

References 3 publications

Feedback Control of MEMS Micromirrors Subject to Parametric Uncertainty

Feedback Control of MEMS Micromirrors Subject to Parametric Uncertainty

Input-shaping control of nonlinear MEMS

The design and assembly of surface-micromachined optical switch for optical add/drop multiplexer application

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