Cluster magnetorheological global dynamic pressure planarization processing of single crystal sapphire

Luo, Bin; Li, Yuwei; Yan, Qiusheng; Chai, Jingfu; Song, Wenqing; Lan, Xi

doi:10.1007/s00170-023-11960-7

Cited by 2 publications

(1 citation statement)

References 26 publications

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“…The primary purpose of these grooves is to vary the distance between the workpiece and the polishing pad regularly, enhancing the effectiveness of magnetorheological polishing. In a comparative study of grooves, wedges, circular microporous arrays, and smooth surface polishing discs, B. Luo et al found that the microporous array polishing disc, with a systematically designed structure, achieved a rough surface of 0.104 nm for sapphire ultra-smooth machining under optimal process conditions [131][132][133].…”

Section: Application Of Flexible Contact Wear Processing Technologymentioning

confidence: 99%

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

Li,

Xin,

Fan

et al. 2024

Micromachines

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Advancements in astronomical telescopes and cutting-edge technologies, including deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography, have escalated demands and imposed stringent surface quality requirements on optical system components. Achieving near-ideal optical components requires ultra-smooth surfaces with sub-nanometer roughness, no sub-surface damage, minimal surface defects, low residual stresses, and intact lattice integrity. This necessity has driven the rapid development and diversification of ultra-smooth surface fabrication technologies. This paper summarizes recent advances in ultra-smooth surface processing technologies, categorized by their material removal mechanisms. A subsequent comparative analysis evaluates the roughness and polishing characteristics of ultra-smooth surfaces processed on various materials, including fused silica, monocrystalline silicon, silicon carbide, and sapphire. To maximize each process’s advantages and achieve higher-quality surfaces, the paper discusses tailored processing methods and iterations for different materials. Finally, the paper anticipates future development trends in response to current challenges in ultra-smooth surface processing technology, providing a systematic reference for the study of the production of large-sized freeform surfaces.

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Section: Application Of Flexible Contact Wear Processing Technologymentioning

confidence: 99%

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

Li,

Xin,

Fan

et al. 2024

Micromachines

View full text Add to dashboard Cite

show abstract

Investigate on surface/subsurface damage mechanisms and manufacturability of ultra-smooth surface in ultra-precision ductile grinding of sapphire optics

Wang,

Zhang,

Zhao

et al. 2024

Journal of Materials Research and Technology

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Cluster magnetorheological global dynamic pressure planarization processing of single crystal sapphire

Cited by 2 publications

References 26 publications

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

Investigate on surface/subsurface damage mechanisms and manufacturability of ultra-smooth surface in ultra-precision ductile grinding of sapphire optics

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