2002
DOI: 10.1039/b208563c
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CMOS-based chemical microsensors

Abstract: Introduction 2 CMOS technology 3 Micromachining techniques 3.1 Bulk micromachining 3.2 Surface micromaching 4 CMOS-based chemical sensors 4.1 Chemomechanical or mass-sensitive sensors 4.1.1 Flexural-plate-wave or Lamb-wave devices 4.1.2 Resonating cantilevers 4.2 Thermal sensors 4.2.1 Catalytic thermal sensors (pellistors) 4.2.2 Thermoelectric or Seebeck-effect-based sensors 4.3 Optical sensors 4.3.1 Bioluminescent bioreporter integrated circuits (BBIC) 4.4 Electrochemical sensors 4.4.1 Voltammetric/amperometr… Show more

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Cited by 117 publications
(56 citation statements)
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References 125 publications
(233 reference statements)
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“…Fig. 2b shows a scheme of CMOS-based thermopile consisting of a dielectric membrane and aluminum/ polysilicon thermocouples [9]. The Seebeck coefficient is equal to 111 mV/K.…”
Section: Catalytic Sensorsmentioning
confidence: 99%
“…Fig. 2b shows a scheme of CMOS-based thermopile consisting of a dielectric membrane and aluminum/ polysilicon thermocouples [9]. The Seebeck coefficient is equal to 111 mV/K.…”
Section: Catalytic Sensorsmentioning
confidence: 99%
“…For an ISFET operating in the saturation region, the drain current is given by (1) where is a process-dependant constant, is the channellength modulation factor, and and are the width and length of the channel. and are the source and drain terminal voltages, and is the applied reference electrode voltage.…”
Section: B the Analogue Subsystemmentioning
confidence: 99%
“…CMOS is the dominant technology for system-on-chip devices, and for integrated circuits in general. In order to exploit the ubiquitous nature of CMOS chips, there have been many initiatives to fabricate chemical sensors in compatible technologies [1]. Most notably, a gas sensor which includes micro-machined resonating beams and digital interface electronics, has been integrated into a single CMOS chip [2].…”
Section: Introductionmentioning
confidence: 99%
“…to interacts (i.e., recognizes or binds) with an analyte [3]. A biosensor usually consists of three elements; a biorecognition, biotransducer, and an electronic system that include a processor, signal amplifier, and display [4,5]. The recognition part often termed as a bioreceptor, which exploits biomolecules as receptors to interact with a specific analyte.…”
Section: Introductionmentioning
confidence: 99%