CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging

Hu, Ting; Zhong, Qize; Li, Nanxi; Dong, Yuan; Xu, Zhengji; Fu, Yuan Hsing; Li, Dongdong; Bliznetsov, Vladimir; Zhou, Yanyan; Lai, Keng Heng; Lin, Qunying; Zhu, Shiyang; Singh, Navab

doi:10.1515/nanoph-2019-0470

Cited by 59 publications

(46 citation statements)

References 31 publications

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“…At no sidewall inclination, the metalens designed here has comparable performance with a similar design that is experimentally demonstrated in Ref. [52]. As shown by the results of Fig.…”

Section: A-si Metalenssupporting

confidence: 74%

A Performance Study of Dielectric Metalens with Process-Induced Defects

Zhou

Liu

et al. 2020

IEEE Photonics J.

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Metalenses based on dielectric nanostructures operating in the transmission mode are of great practical significances. As large-area, multifunctional metalenses are increasingly demanded at higher volumes nowadays, the quality and efficiency of the nanofabrication processes for these lenses are made even more important. Yet, no fabrication is without defects or errors. By using finite-difference time-domain (FDTD) calculation method, we study, in simulation, a set of common fabrication-induced errors such as inclined sidewall, critical dimension (CD) bias and process defects, and analyze their influences on the optical performances of two types of metalenses-one made of amorphous silicon and the other of silicon nitride. The study concludes that the lens behavior generally relies on the resonant nature of the nanostructure array. While most types of defects discussed in this work linearly decrease the focusing efficiency, a few would also influence the quality of the focal spot. Potential solutions to mitigate the effect of the process-induced defects are also investigated. The study provides the particular knowledge to understand the actual metalens performance when fabricated.

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“…At no sidewall inclination, the metalens designed here has comparable performance with a similar design that is experimentally demonstrated in Ref. [52]. As shown by the results of Fig.…”

Section: A-si Metalenssupporting

confidence: 74%

A Performance Study of Dielectric Metalens with Process-Induced Defects

Zhou

Liu

et al. 2020

IEEE Photonics J.

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“…The monolithic fabrication process can be developed based on the mature CMOS fabrication technology. More functional optical components using the materials on the existing CMOS-compatible fabrication line, including Si [51,176], SiO 2 [177], SiN [178] and AlN [179,180], are expected to be demonstrated. More large-area metasurface-based optical components are expected to be realized by deep UV photolithography for mass manufacturing [113].…”

Section: Discussionmentioning

confidence: 99%

“…Besides facial recognition, the fingerprint sensor is also one of the most widely deployed sensors for biometric identification. Different physical mechanisms have been implemented to capture the fingerprint information including optical imaging, capacitive imaging and ultrasonic sensing [51][52][53][54]. However, most systems have issues in detection under various circumstances, such as wet/dry finger, poor contact and susceptibility to spoofing.…”

Section: Biometric Sensor Systemsmentioning

confidence: 99%

Spectral imaging and spectral LIDAR systems: moving toward compact nanophotonics-based sensing

Wang

et al. 2021

Nanophotonics

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With the emerging trend of big data and internet-of-things, sensors with compact size, low cost and robust performance are highly desirable. Spectral imaging and spectral LIDAR systems enable measurement of spectral and 3D information of the ambient environment. These systems have been widely applied in different areas including environmental monitoring, autonomous driving, biomedical imaging, biometric identification, archaeology and art conservation. In this review, modern applications of state-of-the-art spectral imaging and spectral LIDAR systems in the past decade have been summarized and presented. Furthermore, the progress in the development of compact spectral imaging and LIDAR sensing systems has also been reviewed. These systems are based on the nanophotonics technology. The most updated research works on subwavelength scale nanostructure-based functional devices for spectral imaging and optical frequency comb-based LIDAR sensing works have been reviewed. These compact systems will drive the translation of spectral imaging and LIDAR sensing from table-top toward portable solutions for consumer electronics applications. In addition, the future perspectives on nanophotonics-based spectral imaging and LIDAR sensing are also presented.

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“…For example, in a study by Zhang et al [9,80,81], metasurface devices in the mid-infrared wavelength range were fabricated using photolithography, and in a study by Chen et al [32] and Hu et al [82], metasurface devices were designed in the terahertz and microwave frequencies. Recently, there has been a trend in using deep-UV photolithography with an excimer laser source to fabricate metasurfaces at the visible [14] and the near-infrared wavelength [10,83] in an attempt for scalability and mass production.…”

Section: Step 4: Modeling Of Full Lensmentioning

confidence: 99%

“…In fact, this is a hot research topic in the entire metasurface community. Recently, demonstrations of largearea metalenses with single wavelength operation in the visible and near-infrared wavelength ranges [10,14,83,189] and achromatic focusing of small area metalenses [190,191] have been reported. Hence, it is promising that this challenge can be solved soon with the advancement in both metasurface design methodologies and fabrication techniques [44].…”

Section: Future Directionsmentioning

confidence: 99%

Metasurfaces for biomedical applications: imaging and sensing from a nanophotonics perspective

et al. 2020

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Metasurface is a recently developed nanophotonics concept to manipulate the properties of light by replacing conventional bulky optical components with ultrathin (more than 104 times thinner) flat optical components. Since the first demonstration of metasurfaces in 2011, they have attracted tremendous interest in the consumer optics and electronics industries. Recently, metasurface-empowered novel bioimaging and biosensing tools have emerged and been reported. Given the recent advances in metasurfaces in biomedical engineering, this review article covers the state of the art for this technology and provides a comprehensive interdisciplinary perspective on this field. The topics that we have covered include metasurfaces for chiral imaging, endoscopic optical coherence tomography, fluorescent imaging, super-resolution imaging, magnetic resonance imaging, quantitative phase imaging, sensing of antibodies, proteins, DNAs, cells, and cancer biomarkers. Future directions are discussed in twofold: application-specific biomedical metasurfaces and bioinspired metasurface devices. Perspectives on challenges and opportunities of metasurfaces, biophotonics, and translational biomedical devices are also provided. The objective of this review article is to inform and stimulate interdisciplinary research: firstly, by introducing the metasurface concept to the biomedical community; and secondly by assisting the metasurface community to understand the needs and realize the opportunities in the medical fields. In addition, this article provides two knowledge boxes describing the design process of a metasurface lens and the performance matrix of a biosensor, which serve as a “crash-course” introduction to those new to both fields.

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CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging

Cited by 59 publications

References 31 publications

A Performance Study of Dielectric Metalens with Process-Induced Defects

A Performance Study of Dielectric Metalens with Process-Induced Defects

Spectral imaging and spectral LIDAR systems: moving toward compact nanophotonics-based sensing

Metasurfaces for biomedical applications: imaging and sensing from a nanophotonics perspective

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