CMOS fully digital integrated pressure sensors

Chau, Minh Quang; Domı́nguez, Daniel; Bonvalot, B.; Suski, J.

doi:10.1016/s0924-4247(96)01443-4

Cited by 11 publications

(4 citation statements)

References 2 publications

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“…The calibration processes and temperature compensating methods for these sensors are based either on analog, digital or mixed approaches. Analog approach usually comprises an amplifier with laser trimmable thin film resistors (Chau et al, 1997) & (Wang et al, 2005) or off-chip trimmable potentiometers (Schnatz et al, 1992) & (Lee et al, 1999), to calibrate the sensor span and offset voltage and to compensate for their temperature drift. Analog compensation images are first recorded by a camera through a PGP device in the "hyperspectral image acquisition" unit, where spectra of the diffuse reflectance of materials are obtained.…”

Section: Practices Leading To An Inadequate Assessment Of Accuracymentioning

confidence: 99%

Applications and Experiences of Quality Control

Ivanov¹

2011

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Ognyan Ivanov graduated from the Physics Department of the Sofia University "St. Kliment Ohridski". He received his PhD degree from the Georgi Nadjakov Institute of Solid State Physics (ISSP), Bulgarian Academy of Sciences in Sofia, Bulgaria, where he is currently employed. His research activity is in the area of electromagnetic interactions with solids and is concentrated on the creation of various methods for control of materials and processes, mainly in the field of quality control. The methods can be used for the control of solids, liquids and gases. Dr Ivanov is an author and co-author of 54 publications in scientific journals and books, including four invited papers, and he has participated in 26 international conferences. He has worked as a member or leader in 14 projects of ISSP with organizations outside of the Academy. Prof. Ivanov also teaches physics at the University of Architecture, Civil Engineering and Geodesy in Sofia. He is a member of national and international scientific organizations, editorial boards and has also received awards at exhibitions for inventors and innovations.

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Section: Practices Leading To An Inadequate Assessment Of Accuracymentioning

confidence: 99%

Applications and Experiences of Quality Control

Ivanov¹

2011

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“…The calibration processes and temperature compensating methods for these sensors are based either on analog, digital or mixed approaches. Analog approach usually comprises an amplifier with laser trimmable thin film resistors (Chau et al, 1997) & (Wang et al, 2005) or off-chip trimmable potentiometers (Schnatz et al, 1992) & (Lee et al, 1999), to calibrate the sensor span and offset voltage and to compensate for their temperature drift. Analog compensation techniques are relatively slow, inflexible and cost-ineffective.…”

Section: Introductionmentioning

confidence: 99%

Adaptive Calibration and Quality Control of Smart Sensors

Mozek¹,

Vrtačnik²,

Resnik³

et al. 2011

Applications and Experiences of Quality Control

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“…Pressure sensors are very widely spread MEMS devices [1]. Alternatively to the more classical passive resistors mounted in Wheatstone bridge [2][3][4][5], novel active structures have been developed and reported [6][7][8][9]. These are inherently co-integrated solutions which use transistors mounted in ring oscillators and placed on thick silicon membranes, as pressure sensitive elements.…”

Section: Introductionmentioning

confidence: 99%

Routes towards Novel Active Pressure Sensors in SOI Technology

Olbrechts

Rue

Pardoen

et al. 2011

AMR

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In this paper, novel pressure sensors approach is proposed and described. Active devices and oscillating circuits are directly integrated on very thin dielectric membranes as pressure transducers. Involved patterning of the membrane is supposed to cause a drop of mechanical robustness. Finite elements simulations are performed in order to better understand stress/strain distribution and as an attempt to explain the early burst of patterned membranes. Smart circuit designs are reported as solutions with high sensitivity and reduced footprint on membranes.

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CMOS fully digital integrated pressure sensors

Cited by 11 publications

References 2 publications

Applications and Experiences of Quality Control

Applications and Experiences of Quality Control

Adaptive Calibration and Quality Control of Smart Sensors

Routes towards Novel Active Pressure Sensors in SOI Technology

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