CMOS Photodetectors Integrated With Plasmonic Color Filters

Chen, Qin; Chitnis, Danial; Walls, K.; Drysdale, Timothy D.; Collins, Steve; Cumming, David R. S.

doi:10.1109/lpt.2011.2176333

Cited by 127 publications

(89 citation statements)

References 13 publications

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“…Since 2003, the field of plasmonic colour filters has evolved rapidly and several different designs and materials, or combinations of materials, have been studied. For example, in 2010, Chen et al 4 first reported the integration and characterization of hexagonal aluminium array plasmonic colour filters on top of a CMOS photodiode, while in 2013 Burgos et al 5 integrated a separate primary colour (RGB) plasmonic filter with a CIS and demonstrated imaging. Nonetheless, PCFs have not yet been able to match the performances of standard polymer-based colour filters and thus, despite their advantages, they have still not replaced existing filters in commercial CMOS image sensors.…”

Section: Introductionmentioning

confidence: 99%

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Recent progress in plasmonic colour filters for image sensor and multispectral applications

et al. 2016

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Using nanostructured thin metal films as colour filters offers several important advantages, in particular high tunability across the entire visible spectrum and some of the infrared region, and also compatibility with conventional CMOS processes. Since 2003, the field of plasmonic colour filters has evolved rapidly and several different designs and materials, or combination of materials, have been proposed and studied. In this paper we present a simulation study for a singlestep lithographically patterned multilayer structure able to provide competitive transmission efficiencies above 40% and contemporary FWHM of the order of 30 nm across the visible spectrum. The total thickness of the proposed filters is less than 200 nm and is constant for every wavelength, unlike e.g. resonant cavity-based filters such as Fabry-Perot that require a variable stack of several layers according to the working frequency, and their passband characteristics are entirely controlled by changing the lithographic pattern. It will also be shown that a key to obtaining narrow-band optical response lies in the dielectric environment of a nanostructure and that it is not necessary to have a symmetric structure to ensure good coupling between the SPPs at the top and bottom interfaces. Moreover, an analytical method to evaluate the periodicity, given a specific structure and a desirable working wavelength, will be proposed and its accuracy demonstrated. This method conveniently eliminate the need to optimize the design of a filter numerically, i.e. by running several time-consuming simulations with different periodicities.

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Section: Introductionmentioning

confidence: 99%

“…This is because the periodicity of the array provides the additional momentum necessary to observe the EOT phenomenon. 1,4,12 At a metal/dielectric interface, the SPRs are called Surface Plasmon Polaritons (SPPs). Different from Localized Surface Plasmon Resonances (LSPRs), which can be observed e.g.…”

Section: Introductionmentioning

confidence: 99%

Recent progress in plasmonic colour filters for image sensor and multispectral applications

et al. 2016

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“…Various types of plasmonic color filters have been proposed, investigated, and demonstrated, with suggestions put forward regarding their application areas [18][19][20][21][22][23][24][25][26][27].…”

Section: Introductionmentioning

confidence: 99%

Independent Color Filtering of Differently Polarized Light Using Metal-Insulator-Metal Type Guided Mode Resonance Structure

Jung

Park

2016

Journal of the Optical Society of Korea

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The independent operation of a color filter for incident polarization is demonstrated using a guided-mode resonance (GMR) filter employing a metal-insulator-metal (MIM) waveguide. To achieve independent operation, a rectangular MIM grating is proposed as a wave-guide resonator. The design considerations are discussed and include how to determine the grating period and slit width. Power flow distribution is observed with slit width variation. Blue-green, green-red, and blue-red filters for corresponding x-and y-polarizations are demonstrated as application examples with numerical simulation with rectangle-shaped MIM grating. As a practical application, feasibility as a chromatic polarizer is discussed.

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“…In this article we design and fabricate a SMM that selectively filters light in the visible, near infrared (NIR) and terahertz bands in a single aluminum film and can be integrated with the dominant imaging technology (CMOS) to create a multispectral imaging system capable of simultaneous color imaging [31][32][33] and frequency selective terahertz imaging [34] that operates in a manner similar to the standard digital camera. This improves on previous theoretical studies that suggest periodic metallic slit arrays can support two passbands simultaneously [35].…”

Section: Introductionmentioning

confidence: 99%

Hybridization of optical plasmonics with terahertz metamaterials to create multi-spectral filters

et al. 2013

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Multi-spectral imaging systems typically require the cumbersome integration of disparate filtering materials in order to work simultaneously in multiple spectral regions. We show for the first time how a single nano-patterned metal film can be used to filter multi-spectral content from the visible, near infrared and terahertz bands by hybridizing plasmonics and metamaterials. Plasmonic structures are well-suited to the visible band owing to the resonant dielectric properties of metals, whereas metamaterials are preferable at terahertz frequencies where metal conductivity is high. We present the simulated and experimental characteristics of our new hybrid synthetic multi-spectral material filters and demonstrate the independence of the metamaterial and plasmonic responses with respect to each other. 4755-4767 (1995). 40. M. Naftaly and R. E. Miles, "Terahertz time-domain spectroscopy of silicate glasses and the relationship to material properties," J.

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CMOS Photodetectors Integrated With Plasmonic Color Filters

Cited by 127 publications

References 13 publications

Recent progress in plasmonic colour filters for image sensor and multispectral applications

Recent progress in plasmonic colour filters for image sensor and multispectral applications

Independent Color Filtering of Differently Polarized Light Using Metal-Insulator-Metal Type Guided Mode Resonance Structure

Hybridization of optical plasmonics with terahertz metamaterials to create multi-spectral filters

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