2014
DOI: 10.1109/tnano.2014.2310774
|View full text |Cite
|
Sign up to set email alerts
|

Cofabrication of Vacuum Field Emission Transistor (VFET) and MOSFET

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

1
46
0
1

Year Published

2015
2015
2023
2023

Publication Types

Select...
6
1

Relationship

2
5

Authors

Journals

citations
Cited by 78 publications
(48 citation statements)
references
References 13 publications
1
46
0
1
Order By: Relevance
“…However, only after the successful demonstration of MOSFET analogous nanoscale vacuum‐channel transistor operating in air by Han et al, it received significant attention. Figure highlights the details of experimental and theoretical demonstrations of field emission at atmospheric temperature and pressure till date . Furthermore, Table highlights the comparison of performance parameters for both field emission and transistor parameters (where applicable).…”
Section: From Vacuum To Air Medium For Electron Field Emissionmentioning
confidence: 99%
“…However, only after the successful demonstration of MOSFET analogous nanoscale vacuum‐channel transistor operating in air by Han et al, it received significant attention. Figure highlights the details of experimental and theoretical demonstrations of field emission at atmospheric temperature and pressure till date . Furthermore, Table highlights the comparison of performance parameters for both field emission and transistor parameters (where applicable).…”
Section: From Vacuum To Air Medium For Electron Field Emissionmentioning
confidence: 99%
“…Research on vacuum electronics has largely focused on microfabrication efforts, 22 although nanoscale fabrication has been attempted recently. [23][24][25] In addition to radiation immunity, the absence of scattering makes vacuum transport faster than that in semiconductors. Efforts to combine the best of vacuum transport and silicon technology have yielded nanoscale vacuum devices with electrode gaps of 50-150 nm.…”
Section: Introductionmentioning
confidence: 99%
“…As shown in Figure 3 , our fabricated GVTs can work at low voltages of less than 10 V, comparable to those of graphene-based solid-state devices. [ 3,4,[10][11][12] Recently, two fi eld emission vacuum transistors in novel designs, vacuum channel MOS FETs and gate insulated vacuum channel transistors, [19][20][21] were reported to exhibit low working voltages of less than 10 V. However, their switching performances are still unsatisfactory. Vacuum channel MOS FETs exhibited an ON/OFF current ratio of only 500.…”
Section: Resultsmentioning
confidence: 99%
“…[13][14][15][16][17][18] Recently, a couple of vacuum transistors working at the voltages comparable to those of solid-state transistors have been achieved. [19][20][21] However, the performances of these vacuum devices are still overshadowed compared to those of solid-state ones, especially for their low ON/OFF current ratio and slow transition between ON and OFF states.…”
mentioning
confidence: 99%