2014
DOI: 10.1002/adma.201304511
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Coherent X‐Ray Diffraction Imaging and Characterization of Strain in Silicon‐on‐Insulator Nanostructures

Abstract: Coherent X-ray diffraction imaging (CDI) has emerged in the last decade as a promising high resolution lens-less imaging approach for the characterization of various samples. It has made significant technical progress through developments in source, algorithm and imaging methodologies thus enabling important scientific breakthroughs in a broad range of disciplines. In this report, we will introduce the principles of forward scattering CDI and Bragg geometry CDI (BCDI), with an emphasis on the latter. BCDI expl… Show more

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Cited by 33 publications
(24 citation statements)
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References 131 publications
(137 reference statements)
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“…As a lensless technique, BCDI's limiting factor is the maximum spatial frequency at which the phase can be reliably recovered and the durability of the algorithm to reconstruct 3D objects (Xiong et al, 2014). Scripts SS to DCS and DCS to DCS provide a means to create more accurate DCS shapes, which could be turned into initial supports for phase retrieval.…”
Section: Resultsmentioning
confidence: 99%
“…As a lensless technique, BCDI's limiting factor is the maximum spatial frequency at which the phase can be reliably recovered and the durability of the algorithm to reconstruct 3D objects (Xiong et al, 2014). Scripts SS to DCS and DCS to DCS provide a means to create more accurate DCS shapes, which could be turned into initial supports for phase retrieval.…”
Section: Resultsmentioning
confidence: 99%
“…The radial inward contraction would not be visible in the not-aligned facets because BCDI is only sensitive to displacements along the Q-vector of the chosen Bragg peak and, therefore, perpendicular displacement components would not be observed [54,55]. Hence, the strong negative phase observed in these not-aligned facets of nanocrystals 1 and 2 (positive phase for nanocrystal 3) cannot be explained by the radial contraction.…”
Section: Resultsmentioning
confidence: 96%
“…To obtain the real-space electron density distribution, the missing phases of the 3D Fourier intensity need to be determined. To this end, we applied standard iterative phase retrieval to the 3D diffraction data, i.e., a combination of the Hybrid-Input-Output (HIO) and the Error Reduction algorithm (ER) [46][47][48]. In total, 600 iterations were applied, i.e.…”
Section: Real Space (Density)mentioning
confidence: 99%