and breakthroughs by use of dielectric nanoparticles as building blocks, such as structural coloring, [6][7][8] directional light scattering, [9][10][11][12][13] optical chirality, [14] surfaceenhanced spectroscopies, [15,16] light-matter strong coupling, [17][18][19] and multifunctional metasurfaces. [20][21][22] The most common dielectric materials include semiconductors with high refractive indexes above 3.5 (Si, Ge, GaAs) and metal oxides with moderate refractive indexes around 2-3 (TiO 2 , ZrO 2 , ZnO, Cu 2 O). High-refractive-index nanoparticles tend to exhibit well-separated electric and magnetic resonance peaks in their extinction/scattering spectra. On the contrary, the electric and magnetic modes supported by moderate-refractive-index nanoparticles tend to largely overlap with each other. Such different spectral features lead to distinct optical properties. [23] The dielectric nanostructures in previous works have dominantly been fabricated by physical methods, such as femtosecond laser ablation and electron-beam lithography. [4][5][6][7][8][9]11,14,[20][21][22][23] In particular, the fabrication of patterns of dielectric nanomaterials by electron-beam lithography is more complicated than that of plasmonic nanomaterials, since the deposition of thin films of dielectric materials on substrates usually requires chemical vapor deposition, atomic layer deposition and other techniques. Only a few studies have so far demonstrated the chemical synthesis of monodisperse dielectric nanoparticles, including silicon, [24] titania, [25][26][27][28] and cuprous oxide. [10,29] In addition, chemical vapor deposition and aerosol spray have also been developed for the preparation of dielectric sub-micrometer spheres with broad size distributions. [30][31][32] In general, the chemical methods are more facile, cost-efficient and therefore more desirable for large-scale production than the physical methods. Among the aforementioned methods, the aerosol spray method is the most general and powerful one for synthesizing different types of dielectric nanoparticles, including various monometallic metal oxide and complex metal oxide nanoparticles. [33][34][35][36] However, a majority of the previous studies on aerosol spray have focused on the production of mesoporous or hollow metal oxides for catalysis and gas sensing. [35][36][37][38][39] Little attention has been paid to its ability in producing solid and dense metal oxides with high or moderate refractive indexes.In the family of metal oxides, TiO 2 has been recognized as a low-loss and high-performance material for all-dielectric nanophotonics governed by Mie resonances, [40,41]
in additionMetal oxide nanostructures represent a large class of dielectric nanomaterials with high or moderate refractive indexes. Dielectric nanomaterials have recently attracted much attention in the field of all-dielectric nanophotonics. They can support both electric and magnetic resonances without suffering from high losses or heating as their plasmonic counterparts. Although various intrig...