Combination of PCBMEMS and laser ablation to construct inexpensive accelerometers

Luque, A.; Flores, Guadalupe; Perdigones, Francisco; Medina, Daniel Castro; García, Jorge García; Quero, J.M.

doi:10.1109/iecon.2011.6119972

Cited by 3 publications

(3 citation statements)

References 11 publications

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“…If this relation goes to Z/Z 0 = 0 we can conclude that the DUT is a short circuit, and if the relation Z/Z 0 = infinity, then out DUT is an open circuit. 12 SU-8 Photolithography Microvalve with low consumption of energy Aracil et al 13 SU-8 Photolithography Autonomous micromixer Wagler et al 14 SU-8 Photolithography Hybrid system with multiple laboratory functional devices Flores et al 15 SU-8 Photolithography Sánchez et al 16 PMMA Laser ablation Multiplex electrochemical detection of breast cancer markers Luque et al 17 Cu Laser ablation Capacitive accelerometer This work SU-8 Laser ablation Electrochemical cell analysis…”

Section: Methodsmentioning

confidence: 99%

“…Meanwhile, in recent years, the Lab-on-a-printed circuit board (PCB) concept has been reported in many publications [10][11][12][13][14][15][16][17] and reviews. [10][11][12][13][14][15][16][17][18][19] Among them, the integration of the polymer chip and the PCB is the most critical step; 18 which has mostly been done by photolithography [10][11][12][13][14][15] to transfer a desired design onto the structural material, 19 as shown in Table I.…”

Section: Literature Reviewmentioning

confidence: 99%

“…Although SU-8 combined well with lithography technology, it requires high-end equipment, and its cost-effectiveness is usually only achieved at high production volumes. Hence, laser ablation 16,17 has gained attention in the last decade as an alternative to photolithography in several application areas, mainly at the prototyping stage.…”

Section: Literature Reviewmentioning

confidence: 99%

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Fabrication of an Active PCB-MEMS Microfluidic Chip for CHO Cells Characterization by Electrochemical Impedance Spectroscopy

Peña

Contreras-Saenz

Camacho-León

et al. 2021

J. Electrochem. Soc.

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This paper reports the use of laser ablation for the fabrication of a microfluidic device with integrated electrodes on a printed circuit board (PCB-MEMS). The fabricated novel device has flame retardant (FR)−4 resin as substrate, copper (Cu) as active material, and SU-8 polymer as a structural material. The resolution, repeatability, and simplicity achieved in this approach, along with the low cost of the involved materials and methods, enable an affordable micromachining technique with a rapid fabrication-test cycle to develop active microfluidic systems on a chip. Furthermore, an Electrochemical Impedance Spectroscopy (EIS) analysis was performed at different Chinese Hamster Ovary (CHO) cell concentrations (105 to 108 cfu ml−1) to validate device assembly and functionality. The electrical properties of the system were characterized and discussed through a proposed equivalent circuit model comprising five passive elements. The model describes ohmic and non-ideal capacitive behavior of the cytoplasm and membrane of the CHO cells as well as the suspending medium and electrical connections of the device. Likewise, two characteristic times associated with relaxation processes caused by a change in the path of charge transport through the cells are determined.

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