Combined internal resonances at crossover of slacked micromachined resonators

Hajjaj, Amal Z.; Ruzziconi, Laura; Alfosail, Feras K.; Theodossiades, Stephanos

doi:10.1007/s11071-022-07764-1

Cited by 7 publications

(4 citation statements)

References 43 publications

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“…Therefore, we adopt a three-mode approximation for the rest of this paper. In this respect, the developed model is consistent with the literature on the required number of modes to achieve convergence [35]. We show in Figure 12 the frequency response of the arch microbeam for five values of the initial rise.…”

Section: Dynamic Analysis Of Arch Microbeamssupporting

confidence: 82%

“…For instance, asymmetric actuation via electrode 1 or 2, so-called 'half' electrode configuration), enables the activation of the first anti-symmetric mode, whereas symmetric actuation via both electrodes would not be able to activate that mode. We note that the dynamic response of straight and arch microbeams under partial electrode actuation has been extensively studied in the literature [7,19,20,31,32,35,36]. Our objective is to demonstrate the exploitation of their dynamic features to develop novel and efficient detection gas mechanisms.…”

Section: Mathematical Model Of Gas Sensormentioning

confidence: 99%

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Detection Methods for Multi-Modal Inertial Gas Sensors

Najar

Ghommem

Kocer

et al. 2022

Sensors

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We investigate the rich potential of the multi-modal motions of electrostatically actuated asymmetric arch microbeams to design higher sensitivity and signal-to-noise ratio (SNR) inertial gas sensors. The sensors are made of fixed–fixed microbeams with an actuation electrode extending over one-half of the beam span in order to maximize the actuation of asymmetry. A nonlinear dynamic reduced-order model of the sensor is first developed and validated. It is then deployed to investigate the design of sensors that exploit the spatially complex and dynamically rich motions that arise due to veering and modal hybridization between the first symmetric and the first anti-symmetric modes of the beam. Specifically, we compare among the performance of four sensors implemented on a common platform using four detection mechanisms: classical frequency shift, conventional bifurcation, modal ratio, and differential capacitance. We find that frequency shift and conventional bifurcation sensors have comparable sensitivities. On the other hand, modal interactions within the veering range and modal hybridization beyond it offer opportunities for enhancing the sensitivity and SNR of bifurcation-based sensors. One method to achieve that is to use the modal ratio between the capacitances attributed to the symmetric and asymmetric modes as a detector, which increases the detection signal by three orders of magnitude compared to a conventional bifurcation sensor. We also present a novel sensing mechanism that exploits a rigid arm extending transversely from the arch beam mid-point and placed at equal distances between two side electrodes. It uses the asymmetry of the arch beam motions to induce rotary motions and realize a differential sensor. It is found to increase the detection signal by two orders of magnitude compared to a conventional bifurcation sensor.

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Section: Dynamic Analysis Of Arch Microbeamssupporting

confidence: 82%

Section: Mathematical Model Of Gas Sensormentioning

confidence: 99%

Detection Methods for Multi-Modal Inertial Gas Sensors

Najar

Ghommem

Kocer

et al. 2022

Sensors

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“…The value of damping influences the AC actuation needed to lead to nonlinear behaviour and the amplitude of the two resonators. Note that the values of damping ratios were chosen arbitrarily, but having the same order of magnitude as previous research studies [38,44], to show the damping effect on the numerical simulations. Under ultra-low damping conditions (f 1 ¼ f 2 ¼ 2:222 Â 10 À3 ) in Fig.…”

Section: Effects Of Damping Coefficientmentioning

confidence: 99%

A multi-sensing scheme based on nonlinear coupled micromachined resonators

et al. 2023

Self Cite

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A new multi-sensing scheme via nonlinear weakly coupled resonators is introduced in this paper, which can simultaneously detect two different physical stimuli by monitoring the dynamic response around the first two lowest modes. The system consists of a mechanically coupled bridge resonator and cantilever resonator. The eigenvalue problem is solved to identify the right geometry for the resonators to optimize their resonance frequencies based on mode localization in order to provide outstanding sensitivity. A nonlinear equivalent model is developed using the Euler–Bernoulli beam theory while accounting for the geometric and electrostatic nonlinearities. The sensor's dynamics are explored using a reduced-order model based on two-mode Galerkin discretization, which reveals the richness of the response. To demonstrate the proposed sensing scheme, the dynamic response of the weakly coupled resonator is investigated by tuning the stiffness and mass of the bridge and cantilever resonators, respectively. With its simple and scalable design, the proposed system shows great potential for intelligent multi-sensing detection in many applications.

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“…Micro/nanomechanical resonator sensing technology has substantially advanced as driven by the ever-growing comprehension and utilization of fundamental physical phenomena. Various intrinsic physical phenomena, such as internal resonance [1][2][3][4] , phase synchronization [5][6][7] , phononcavity [8][9][10][11] , and mode localization [12][13][14] , have been developed and employed to overcome the sensing resolution of the resonator(s). Among these nonlinear physics explorations, notable achievements include noise reduction and stability enhancement, along with quality factor improvement through internal resonance and phase synchronization 1 .…”

Section: Introductionmentioning

confidence: 99%

A decouple-decomposition noise analysis model for closed-loop mode-localized tilt sensors

Wang,

Xiong,

Wang

et al. 2023

Microsyst Nanoeng

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The development of mode-localized sensors based on amplitude output metrics has attracted increasing attention in recent years due to the potential of such sensors for high sensitivity and resolution. Mode-localization phenomena leverage the interaction between multiple coupled resonant modes to achieve enhanced performance, providing a promising solution to overcome the limitations of traditional sensing technologies. Amplitude noise plays a key role in determining the resolution of mode-localized sensors, as the output metric is derived from the measured AR (amplitude ratio) within the weakly coupled resonator system. However, the amplitude noise originating from the weakly coupled resonator’s closed-loop circuit has not yet been fully investigated. This paper presents a decouple-decomposition (DD) noise analysis model, which is applied to achieve high resolution in a mode-localized tilt sensor based on a weakly coupled resonator closed-loop circuit. The DD noise model separates the weakly coupled resonators using the decoupling method considering the nonlinearity of the resonators. By integrating the decoupled weakly coupled resonators, the model decomposes the weakly coupled resonator’s closed-loop circuit into distinct paths for amplitude and phase noise analyses. The DD noise model reveals noise effects at various circuit nodes and models the system noise in the closed-loop circuit of the weakly coupled resonators. MATLAB/Simulink simulations verify the model’s accuracy when compared to theoretical analysis. At the optimal operating point, the mode-localized tilt sensor achieves an input-referred instability of 3.91 × 10-4° and an input-referred AR of PSD of 2.01 × 10-4°⁄√Hz using the closed-loop noise model. This model is also applicable to other varieties of mode-localized sensors.

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Combined internal resonances at crossover of slacked micromachined resonators

Cited by 7 publications

References 43 publications

Detection Methods for Multi-Modal Inertial Gas Sensors

Detection Methods for Multi-Modal Inertial Gas Sensors

A multi-sensing scheme based on nonlinear coupled micromachined resonators

A decouple-decomposition noise analysis model for closed-loop mode-localized tilt sensors

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