Common-path laser encoder with Littrow configuration

Wu, Chyan-Chyi; Liao, Chia-Huang; Chen, Yan-Zou; Yang, Jhih-Sheng

doi:10.1016/j.sna.2012.12.035

Cited by 6 publications

(9 citation statements)

References 17 publications

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“…1. Actually, there are two common-path configurations in the CLPE readhead [21]. One configuration is for the X -displacement, and the other one is for the Y -displacement.…”

Section: Principlementioning

confidence: 99%

Common-path laser planar encoder

Chen

Liao

2013

Opt. Express

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This paper presents a common-path laser planar encoder (CLPE) for displacement measurements in the X- and Y- axes. The CLPE can effectively reduce the environmental disturbance to its lowest level. The experimental results of the CLPE match well with those of HP5529A for both short and long ranges. The CLPE can measure 2D displacement with high resolutions of 0.07 ± 0.021 nm and 0.07 ± 0.023 nm in the X- and Y- axes and also presents high system stabilities of -0.59 ± 0.43 nm/h and -0.63 ± 0.47 nm/h respectively in the X- and Y- axes. The CLPE has promising potential for nanometer resolution and large-range applications.

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“…1. Actually, there are two common-path configurations in the CLPE readhead [21]. One configuration is for the X -displacement, and the other one is for the Y -displacement.…”

Section: Principlementioning

confidence: 99%

Common-path laser planar encoder

Chen

Liao

2013

Opt. Express

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“…Precision measurement is one of the key technologies in the modern industry and a sign of technology and industrial competitive power of countries. The precise displacement determination involves all aspects of manufacturing system engineering, such as the atomic force probes [1,2], the accelerometers [3], the nanopositioning equipment in machine processing [4], the scanning stages [5], the confocal laser scanning microscope [6], the structural health monitoring [7], the landslide monitoring [8], the compliant microgripper [9], and the compliant micro-positioning platform [10]. The optical displacement sensor is widely used in the field of precise and ultraprecise displacement measurement due to advantages of non-contact process, high precision, and broadband [11][12][13].…”

Section: Introductionmentioning

confidence: 99%

“…In recent years, laser interferometers and grating interferometers have become the main representations of the optical displacement sensor [12]. Laser interferometers are commonly used to achieve high-precision displacement sensing with independence of high-precision manufacturing process [5,13]. However, laser interferometers are subject to environment disturbances such as temperature, pressure, humidity variations, and even vibrations.…”

Section: Introductionmentioning

confidence: 99%

Sub-Nanometer Displacement Sensor Based on Coupling of Balanced Loss and Gain Cavities

Fang

2018

Photonic Sens

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Sub-nanometer displacement measurement is still a challenge in the current sensor field. In this study, a new type of displacement sensor is designed which is based on the coupling effect of two balanced gain and loss resonators. The optical properties of the sensor have been studied through the coupled mode theory and scatter matrix. The pole effect in the coupling system can be used to measure the sub-nanometer displacement. The resolution of the sensor can reach 0.001 nm over a dynamic range of 20 nm. The sensor has the highest sensitivity within the range of one nanometer. The environmental disturbance and structure parameter perturbation have been demonstrated to make trivial effect on the sensor performance.

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“…Some important error sources can be categorized as installation error, optics errors, electronics error, and environmental error [7]- [9]. The main part of uncertainty for measurement equipment is periodic nonlinear error.…”

Section: Introductionmentioning

confidence: 99%

Impact of the Imperfect Polarizing-Beam Splitter and Quarter-Wave Plate and Non-Ideal Laser Beam on the Accuracy of Nano-Displacement Laser Encoder

2017

IJOMAM

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Abstract:In this paper, periodic nonlinear error of laser encoder for nano-displacement measurement caused by imperfection of polarizing-beam splitter (PBS), quarter-wave plate (QWP), and laser source is modeled by using the Jones matrix analysis. The results reveal that the peak-topeak nonlinearity resulting from imperfect PBS and QWP, and non-orthogonality and ellipticity of the polarized laser beams is obtained as 14.82 nm. Also, considering typical values of transmittance and reflectance coefficients of PBS and different retardation errors of QWP, the first-order and second-order nonlinearities are respectively revealed resulting from imperfect PBS and QWP.Keywords: Jones matrix, nano-displacement, nonlinearity error, polarizing-beam splitter, nanometrology, quarter-wave plate.

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Common-path laser encoder with Littrow configuration

Cited by 6 publications

References 17 publications

Common-path laser planar encoder

Common-path laser planar encoder

Sub-Nanometer Displacement Sensor Based on Coupling of Balanced Loss and Gain Cavities

Impact of the Imperfect Polarizing-Beam Splitter and Quarter-Wave Plate and Non-Ideal Laser Beam on the Accuracy of Nano-Displacement Laser Encoder

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