Common-path laser planar encoder

Wu, Chyan-Chyi; Chen, Yan-Zou; Liao, Chia-Huang

doi:10.1364/oe.21.018872

Cited by 18 publications

(6 citation statements)

References 21 publications

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“…The above experimental results show that the proposed surface encoder can measure not only in-plane displacement, but also out-of-plane displacement compared with planar encoders [ 23 , 24 , 25 ]. Additionally, it expanded its measuring range in out-of-plane direction ( Z -axis direction) from hundreds of micrometers to ±1.5 mm compared with conventional surface encoders [ 26 , 27 , 28 ] while reducing the optical size [ 33 , 34 ].…”

Section: Testing Of the Modified Two-axis Surface Encodermentioning

confidence: 89%

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Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range

Hong

Sato

Shimizu

et al. 2022

Sensors

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A modified two-axis surface encoder is proposed to separately measure both the in-plane displacement and the Z-directional out-of-plane displacement with minor crosstalk errors. The surface encoder is composed of a scale grating and a small-sized sensor head. In the modified surface encoder, the measurement laser beam from the sensor head is designed to be projected onto the scale grating at a right angle. For measurement of the X- and Y-directional in-plane scale displacement, the positive and negative first-order diffracted beams from the scale grating are superimposed on each other in the sensor head, producing interference signals. On the other hand, the Z-directional out-of-plane scale displacement is measured based on the principle of a Michelson-type interferometer. To avoid the influence of reflection from the middle area of the transparent grating, which causes periodic crosstalk errors in the previous research, a specially fabricated transparent grating with a hole in the middle is employed in the newly designed optical system. A prototype sensor head is constructed, and basic performances of the modified surface encoder are tested by experiments.

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Section: Testing Of the Modified Two-axis Surface Encodermentioning

confidence: 89%

“…Planar encoders have been proposed to detect two-axis in-plane displacements [ 23 , 24 , 25 ]. To also detect the out-of-plane displacement, the authors’ group have been working on the development of a three-axis displacement sensor referred to as the surface encoder [ 26 , 27 , 28 ].…”

Section: Introductionmentioning

confidence: 99%

Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range

Hong

Sato

Shimizu

et al. 2022

Sensors

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“…typically require multiple sensing heads or optical access ports. In addition, various designs using gratings to achieve multi-dimensional displacement measurements have been conceived [22,23,24,25,26,27,28].…”

Section: Introductionmentioning

confidence: 99%

Three-dimensional interferometric stage encoder using a single access port

Wiseman

Kissinger

Tatam

2021

Optics and Lasers in Engineering

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“…Although it is difficult to assure high accuracy because there are some critical issues such as a periodic error, a distortion error, and a thermal error, optical linear encoders are often employed in precision positioning systems in machine tools and measuring instruments due to their high resolutions and easy-to-use designs. Many efforts have been made so far to improve the resolution of optical linear encoders [28,32,33,34,35,36,37,38,39,40,41,42], and nowadays state-of-the-art optical linear encoders can realize a sub-nanometer resolution comparable to that of the laser interferometers [4,6,7]. Furthermore, absolute linear encoders enable machine tools, measuring instruments and fabrication equipment to be operated without the initialization of their positioning systems [43], which is mandatory when the incremental laser interferometers and/or linear encoders are employed.…”

Section: Introductionmentioning

confidence: 99%

Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

Shimizu

Matsukuma

Gao

2019

Sensors

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In dimensional metrology it is necessary to carry out multi-axis angle and displacement measurement for high-precision positioning. Although the state-of-the-art linear displacement sensors have sub-nanometric measurement resolution, it is not easy to suppress the increase of measurement uncertainty when being applied for multi-axis angle and displacement measurement due to the Abbe errors and the influences of sensor misalignment. In this review article, the state-of-the-art multi-axis optical sensors, such as the three-axis autocollimator, the three-axis planar encoder, and the six-degree-of-freedom planar encoder based on a planar scale grating are introduced. With the employment of grating reflectors, measurement of multi-axis translational and angular displacement can be carried out while employing a single laser beam. Fabrication methods of a large-area planar scale grating based on a single-point diamond cutting with the fast tool servo technique and the interference lithography are also presented, followed by the description of the evaluation method of the large-area planar scale grating based on the Fizeau interferometer.

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Common-path laser planar encoder

Cited by 18 publications

References 21 publications

Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range

Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range

Three-dimensional interferometric stage encoder using a single access port

Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

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