Compact Biomimetic Hair Sensors Based on Single Silicon Nanowires for Ultrafast and Highly-Sensitive Airflow Detection

Huang, Shuying; Zhang, Bingchang; Lin, Yuan; Lee, Chun‐Sing; Zhang, Xiaohong

doi:10.1021/acs.nanolett.1c00852

Cited by 34 publications

(35 citation statements)

References 45 publications

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“…Compared with the sensors with response times below 1 s, the sensor in this work provides a wider measurement range up to 53.5 ms −1 . It is worth noting that the measured response time (12 ms) is more than three times shorter than the shortest value (40 ms) previously reported in the literature 6 . This remarkable performance can be attributed to the fast photoelectric conversion in the InGaN/GaN MQW diode structure, and the transient response to the electrical pulse signal is as low as 1.2 μs (see Supplementary Information ), which is 2–3 orders of magnitude smaller than that of the previously reported sensor (at submillisecond scales) 11 , 13 .…”

Section: Resultscontrasting

confidence: 52%

“…The velocity measurement and distribution analysis of airflow is of great significance in the fields of atmospheric environmental monitoring, aerodynamic studies, turbine inspection, navigation control, biomedical engineering, and so on 1 – 5 . Sensing devices employing the principles of thermoresistance 6 – 9 , piezoresistance 10 – 13 , electrical resistance 14 – 16 , capacitance 17 , magnetoelasticity 18 , and mechanoluminescence 19 have been developed for airflow detection. However, the achievement of a sensor with both fast response and a wide measurement range remains an unsolved challenge.…”

Section: Introductionmentioning

confidence: 99%

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Chip-scale optical airflow sensor

Luo

Liang

et al. 2022

Microsyst Nanoeng

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Airflow sensors are an essential component in a wide range of industrial, biomedical, and environmental applications. The development of compact devices with a fast response and wide measurement range capable of in situ airflow monitoring is highly desirable. Herein, we report a miniaturized optical airflow sensor based on a GaN chip with a flexible PDMS membrane. The compact GaN chip is responsible for light emission and photodetection. The PDMS membrane fabricated using a droplet-based molding process can effectively transform the airflow stimuli into optical reflectance changes that can be monitored by an on-chip photodetector. Without the use of external components for light coupling, the proposed sensor adopting the novel integration scheme is capable of detecting airflow rates of up to 53.5 ms−1 and exhibits a fast response time of 12 ms, holding great promise for diverse practical applications. The potential use in monitoring human breathing is also demonstrated.

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Section: Resultscontrasting

confidence: 52%

Section: Introductionmentioning

confidence: 99%

Chip-scale optical airflow sensor

Luo

Liang

et al. 2022

Microsyst Nanoeng

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“…In this work, sensitivity was defined as the Δ R / R 0 generated by unit gas velocity in the low‐velocity region (unit, s m −1 ), that is, the slope of the Δ R / R 0 versus velocity curve near the detection threshold (Figure 3b), which is similar to the definition of gauge factor in other literature. [ 17,21,40 ] Δ R / R 0 divided by gas velocity was also calculated to represent the sensitivity over the whole detection range (Figure S20, Supporting Information). The sparse network possessed the smallest detection threshold of 0.11 m s −1 , which is one of the best values ever reported (Table S2, Supporting Information).…”

Section: Resultsmentioning

confidence: 99%

Ultrasensitive Airflow Sensors Based on Suspended Carbon Nanotube Networks

et al. 2022

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applications. Recently, bionic fluffy fabrics learning from many animals, such as crickets and spiders, were reported to fabricate airflow sensors but usually exhibited low sensitivity and slow response speed against different airflows. [9,10] Therefore, the rational design and controllable fabrication of airflow sensors are urgently needed to tackle their issues of poor performance.For piezoresistive materials, sufficient deformation under external forces is the prerequisite for causing resistance variations, which calls for the excellent flexibility of the component materials. Besides, lightweight materials are easy to change their states of motion due to their low inertia, ensuring a fast response to external stimuli. For composite-based sensors, the interfacial areas within the composites should also be reduced because the interfaces often behave like capacitors under external electrical fields, [11] which inevitably causes a decline in the response speed of sensors owing to the charging-discharging processes. Therefore, from the perspective of material selection, flexible and lightweight materials with small interfacial areas show more advantages in fabricating highly sensitive and responsive piezoresistive sensors.Carbon nanotubes (CNTs) are supposed to be ideal candidates for fabricating high-performance piezoresistive airflow sensors because of their intrinsic properties, such as nanosized diameters, high aspect ratio and flexibility, low density, and excellent mechanical and electrical properties, [12,13] which fully meet the requirements for airflow sensors. However, the previous attempts to incorporate CNTs with other materials for making airflow sensors usually produced mixed bulky structures with declined mechanical properties, thus degrading their performance as sensors. [14][15][16][17][18] For example, the response time of many CNT-based sensors generally ranges from one to several seconds, [9,[19][20][21] which is far inferior to the expected performance of individual CNT-based sensors. [22][23][24] In previous studies, carbonized silk fabric (CSF) decorated with fluffylike CNTs were developed as piezoresistive airflow sensors, of which the sensing performance was simultaneously determined by the properties of CSF and CNTs. [9] Although the CNT assembly with a foam-like structure was capable of sensing very mild airflows, its response time was ≈1.3 s, which could High-performance airflow sensors are in great demand in numerous fields but still face many challenges, such as slow response speed, low sensitivity, large detection threshold, and narrow sensing range. Carbon nanotubes (CNTs) exhibit many advantages in fabricating airflow sensors due to their nanoscale diameters, excellent mechanical and electrical properties, and so on. However, the intrinsic extraordinary properties of CNTs are not fully exhibited in previously reported CNT-based airflow sensors due to the mixed structures of macroscale CNT assemblies. Herein, this article presents suspended CNT networks (SCNTNs) as high-performance a...

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“…[ 52 ] The latter is particularly suitable for realizing a high‐density integration of discrete logic or LED units upon elastomer substrate. Furthermore, the semiconducting SiNW channels, by themselves, could also be engineered into elastic spring forms and transferred directly onto PDMS substrate for device fabrication, [ 34 ] similar to the stretchable wavy c‐Si sheets, [ 53 ] ultra‐long Si nanoribbons [ 54 , 55 ] and ultra‐long SiNWs, [ 23 , 56 ] which represent a promising avenue to accomplish fully stretchable and durable high‐performance soft electronics, based on the mature c‐Si technology.…”

Section: Resultsmentioning

confidence: 99%

Highly Stretchable High‐Performance Silicon Nanowire Field Effect Transistors Integrated on Elastomer Substrates

Song

Zhang

et al. 2022

Advanced Science

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Quasi‐1D silicon nanowires (SiNWs) field effect transistors (FETs) integrated upon large‐area elastomers are advantageous candidates for developing various high‐performance stretchable electronics and displays. In this work, it is demonstrated that an orderly array of slim SiNW channels, with a diameter of <80 nm, can be precisely grown into desired locations via an in‐plane solid‐liquid‐solid (IPSLS) mechanism, and reliably batch‐transferred onto large area polydimethylsiloxane (PDMS) elastomers. Within an optimized discrete FETs‐on‐islands architecture, the SiNW‐FETs can sustain large stretching strains up to 50% and repetitive testing for more than 1000 cycles (under 20% strain), while achieving a high hole carrier mobility, Ion/Ioff current ratio and subthreshold swing (SS) of ≈70 cm2 V−1 s−1, >105 and 134 ‐ 277 mV decade−1, respectively, working stably in an ambient environment over 270 days without any passivation protection. These results indicate a promising new routine to batch‐manufacture and integrate high‐performance, scalable and stretchable SiNW‐FET electronics that can work stably in harsh and large‐strain environments, which is a key capability for future practical flexible display and wearable electronic applications.

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Compact Biomimetic Hair Sensors Based on Single Silicon Nanowires for Ultrafast and Highly-Sensitive Airflow Detection

Cited by 34 publications

References 45 publications

Chip-scale optical airflow sensor

Chip-scale optical airflow sensor

Ultrasensitive Airflow Sensors Based on Suspended Carbon Nanotube Networks

Highly Stretchable High‐Performance Silicon Nanowire Field Effect Transistors Integrated on Elastomer Substrates

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