Compact ellipsometer employing a static polarimeter module with arrayed polarizer and wave-plate elements

Abstract

A portable ellipsometer with a compact static polarimeter using an arrayed polarizer, an arrayed wave plate, and a CCD image sensor is developed. A high level of repeatability at a measurement speed of 0.3 s is demonstrated by measurement of SiO(2) films ranging from 2 to 300 nm in thickness deposited on an Si wafer. There is the potential to realize an ultracompact ellipsometer module by integrating the optical source and receiver, suitable for deployment in a variety of manufacturing equipment and measurement instruments.

A method for quantitatively analyzing the angle of direction for arbitral c-axis alignment with retardation measurements

“…The optical-axis measurement system of Fig. 1 is arranged with a light source which ejects a circular polarization light, the object to be measured, the quarter wavelength (λ/4 where λ is the designed light wavelength) array which allows a two-dimensional arrangement of several quarter wavelengths plates for which the direction of an optic axis differs mutually by Photonic-Lattice Co. Ltd. [17,18], the analyzer, and the light receiving unit array with a charge coupled device (CCD) which realizes a two-dimensional arrangement. The circular polarization light emitted from the lighting source system is targeted for an analyzer and a photo-detector as the light receiving unit array, and the circular polarization light at a slight phase shift that passes the object and the quarter wavelengths array is detected by an analyzer.…”

Construction of a portable parallel phase-shifting digital holography system

“…3. The micropolarizers were fabricated by the technique of photonic crystals 37 and optimized for the light of 532-nm wavelength. The number of cells of micropolarizers was 1164 (H)×874 (V).…”

Dual-layer metal-grid polarizer for polarization image sensor in 65-nm CMOS technology

“…It is expected that an image sensor with the on-chip polarizer can be applied to optical measurement based on polarization [1][2][3][4][5][6][7][8][9][10][11][12][13]. For example, optical coherence tomography, optical activity measurement, RF electric field measurement are potential applications.…”