Compact Low-Voltage Operation Micromirror Based on High-Vacuum Seal Technology Using Metal Can

Design, fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner

“…It was also shown that, even for the gimbal frame of 162 Hz resonant frequency, the operation voltage decreased by a factor of 3 when compared with that in atmosphere. Employing the hermetic vacuum packaging at the pressure around 1 Pa [20], a mobile 2-D comb-drive scanner operated at the voltage of 10 V will be obtained. and packaging micromirrors in vacuum for laser scanning displays.…”

“…The dependences of quality factor on pressure for the inner mirror and the gimbal frame are investigated experimentally and compared with theoretical calculations based on air-friction models in viscous and molecular flow regions. Compared to our previous works [20,21], this paper expands the study of vacuum operation for a more complete device, 2-D microscanner instead of 1-D microscanner.…”

“…It was recently reported that the operation voltage was decreased substantially by decreasing the air friction of comb-drive micro-mirror at a high resonant frequency when the mirror was operated in vacuum [5,[18][19][20][21]. In Ref.…”

“…In order to use this advantage for mobile micro-mirror, vacuum packaging is a key technology. The micro mirrors were recently packaged in vacuum by anodic bonding [18] and metal can packaging [20]. The air friction influence and the characteristics of vacuum operation of one-dimensional micromirrors were investigated quantitatively in experiments and theories, specially for the high-frequency-resonant display mirror [21].…”

Wireless Driving of a Micromirror Device by Electoromagnetic Excitation Tuned to Mechanical Resonance of Rotation

“…Under the vacuum condition, Q factor of the MEMS device driving easily reaches to 1000 [23,24]. This is achieved by packaging the micromirror device such as hermetic seal [24,25]. Taking the expected Q factors into the consideration, the mirror rotation angle is evaluated by multiplying the enhancement factor by the increased Q factor with the rotation angle of 0.015 deg.…”