Compact optical position feedback scheme for MOEMS mirrors

Tortschanoff, A.; Baumgart, Marcus; Holzmann, Dominik; Lenzhofer, M.; Sandner, Thilo; Kenda, A.

doi:10.1007/s00542-013-2026-2

Cited by 7 publications

(4 citation statements)

References 11 publications

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“…Their mutually dependence and interaction is in-deep investigated from a more theoretical point-of-view in [4] & [5]. First experimental setups characterizing mirror's deflection angles are shown in [6].…”

Section: Feasible Measurement Principlementioning

confidence: 99%

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Integrated packaging of 2D MOEMS mirrors with optical position feedback

et al. 2015

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Many applications of MOEMS microscanners rely on accurate position feedback. For MOEMS devices which do not have intrinsic on-chip feedback, position information can be provided with optical methods, most simply by using a reflection from the backside of a MOEMS scanner. By measuring the intensity distribution of the reflected beam across a quadrant diode, one can precisely detect the mirror's deflection angles. Previously, we have presented a position sensing device, applicable to arbitrary trajectories, which is based on the measurement of the position of the reflected laser beam with a quadrant diode. In this work, we present a novel setup, which comprises the optical position feedback functionality integrated into the device package itself. The new device's System-in-Package (SiP) design is based on a flip-folded 2.5D PCB layout and fully assembled as small as 9.2×7×4 mm³ in total. The device consists of four layers, which supply the MOEMS mirror, a spacer to provide the required optical path length, the quadrant photo-diode and a laser diode to serve as the light source. In addition to describing the mechanical setup of the novel device, we will present first experimental results and optical simulation studies. Accurate position feedback is the basis for closed-loop control of the MOEMS devices, which is crucial for some applications as image projection for example. Position feedback and the possibility of closed-loop control will significantly improve the performance of these devices.

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Section: Feasible Measurement Principlementioning

confidence: 99%

“…An optical feedback sensor prototype based on the principle described in chapter 2.2 was realized in [6] using a conventional planar PCB layout. This setup consisted of two independent planar PCB layers, which were fixed with screws and washer rings on an additional baseplate.…”

Section: System-in-package (Sip) Mems Feedback Sensor Idea and Componmentioning

confidence: 99%

Integrated packaging of 2D MOEMS mirrors with optical position feedback

et al. 2015

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“…Tortschanoff A. et.al. [11] have proposed a compact device for MOEMS mirrors with microcontrollerbased driver for position sensing. Characteristics of this device were determined by experimentation, theoretical consideration, and optical simulation.…”

Section: Micro Mirrorsmentioning

confidence: 99%

Advances in Development of MOEMS Devices: A Review

Joshi¹

2019

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Micro-Opto-Electro-Mechanical Systems (MOEMS) are the combination of Micro-Electro-Mechanical Systems (MEMS) merged with Micro-optics. The precision workings of MEMS, its optical functionality, and fabrication techniques make possible a broad variety of movable and tunable mirrors, filters, and other optical structures. Microoptics has new features that are widely used in many applications than the classical optics. MOEMS contain movable components that have an effect on an optical signal that is pointed towards the surface of this optical component. In this paper, the focus is on MOEMS mirrors, filters, switches and few applications. Additionally, the emphasis is on finding the important and key issues for identification of scope for further work.

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“…Advances in fabrication of micro-devices and the need to process optical signals have promoted the development of micro-optical systems (MOS) [1][2][3][4]. The MOS are used in images forming systems, interconnetors, signal processing, etc.…”

Section: Introductionmentioning

confidence: 99%